A general relation between the ranges of stability of electrostatic actuators under charge or voltage control

Applied Physics Letters

Volumn 82, Issue 2, 2003, Pages 302-304

  Bochobza Degani, Ofir ^a   Elata, David ^a   Nemirovsky, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC POTENTIAL; MATRIX ALGEBRA; MICROELECTROMECHANICAL DEVICES; VOLTAGE CONTROL;

CHARGE CONTROL;

ELECTROSTATIC ACTUATORS;

EID: 0037434178     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1536251     Document Type: Article

References (9)

1. H. C. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, Jr., IEEE Trans. Electron Devices ED-14, 117 (1967).
2. L. J. Hombeck, Proc. SPIE 1150, 86 (1989).
3. Y. Nemirovsky and O. Degani, J. Microelectromech. Syst. 10, 601 (2001).
4. R. Nadal-Guardia, A. Dehe, R. Aigner, and L. M. Castaner, J. Microelectromech. Syst. 11, 255 (2002).
5. W. B. Song and J. J. Talghader, Appl. Phys. Lett. 81, 550 (2002).
6. F. Yang, J. Appl. Phys. 92, 2789 (2002).
7. H. B. Chart, V. A. Aksyuk, R. N. Kleiman, D. J. Bishop, and F. Capasso, Science 291, 1941 (2001).
8. M. W. J. Prins, W. J. J. Welters, and J. W. Weekamp, Science 291, 277 (2001).
9. H. B. Callen, Thermodynamics (Wiley, London, 1960).