Operation of microfabricated harmonic and ordinary side-drive motors

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 1-8

  Mehregany, Mehran ^a   Nagarkar, Pradnya ^a   Senturia, Stephen D ^a   Lang, Jeffrey H ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MOTORS--DESIGN; ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL;

HARMONIC SIDE-DRIVE MOTOR; MICROFABRICATION; MICROMOTORS; VARIABLE-CAPACITANCE SIDE-DRIVE MOTORS;

ELECTRIC MOTORS, AC;

EID: 0025644075     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)