Simulating nonlinear dynamics and chaos in a MEMS cantilever using poincare mapping

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1092-1095

  Liu, S ^a   Davidson, A ^a   Lin, Q ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Casimir effect; Chaos; Damping; Electrostatics; Micromechanical devices; Nanoelectromechanical systems; Nonlinear dynamical systems; Nonlinear equations; Open loop systems; Servosystems

Indexed keywords

ACTUATORS; CHAOS THEORY; DAMPING; DIGITAL STORAGE; DYNAMICAL SYSTEMS; DYNAMICS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MAPPING; MICROSYSTEMS; NANOCANTILEVERS; NEMS; NONLINEAR DYNAMICAL SYSTEMS; SERVOMECHANISMS; SOLID-STATE SENSORS; TRANSDUCERS;

CASIMIR EFFECTS; CLOSED-LOOP CONTROL; EXCITATION PARAMETERS; MEMS CANTILEVERS; MICROMECHANICAL DEVICE; OPEN LOOP SYSTEMS; POINCARE MAPPING; STABLE OPERATION;

NONLINEAR EQUATIONS;

EID: 33750544826     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216959     Document Type: Conference Paper

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