Compensation of temperature effects on the pull-in voltage of microstructures

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 351-356

  Rocha, Luis Alexandre ^a   Cretu, Edmond ^a,b   Wolffenbuttel, Reinoud F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Melexis ^*  (Belgium)

Author keywords

Microelectromechanical systems; Pull in voltage; Temperature compensation

Indexed keywords

CAPACITANCE; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; THERMAL EFFECTS;

CAPACITIVE DISPLACEMENT MEASUREMENTS; PULL IN VOLTAGE; TEMPERATURE COMPENSATION;

ELECTROSTATIC ACTUATORS;

EID: 4544299705     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.075     Document Type: Conference Paper

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