Surface-micromachined electrostatic microrelay

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 345-354

  Schiele, Ignaz ^a   Huber, Jörg ^a   Hillerich, Bernd ^a   Kozlowski, Frank ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

Electrostatic relays; Microrelays; Microswitches; Rf switches; Surface micromachined relays

Indexed keywords

ELECTRIC RESISTANCE; ELECTROSTATIC DEVICES; MICROMACHINING;

ELECTROSTATIC MICRORELAYS;

ELECTRIC RELAYS;

EID: 0032047247     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01703-2     Document Type: Article

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