Electrostatically deflectable polysilicon micromirrors - Dynamic behaviour and comparison with the results from FEM modelling with ANSYS

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 89-95

  Fischer, M ^a,b   Giousouf, M ^a   Schaepperle, J ^a   Eichner, D ^a   Weinmann, M ^a,c   Von Munch W ^a   Assmus, F ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b SIEMENS AG   (Germany)

^c FESTO AG AND CO KG   (Germany)

Author keywords

ANSYS; Dynamic behaviour; Electrostatically deflectable; FEM modelling; Pull in voltage; Squeeze film theory; Torsional micromirrors

Indexed keywords

ELECTROSTATICS; FINITE ELEMENT METHOD; SILICON;

TORSIONAL MICROMIRRORS;

MIRRORS;

EID: 0041349502     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01770-6     Document Type: Article

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