Radiation effects on surface micromachined comb drives and microengines

IEEE Transactions on Nuclear Science

Volumn 45, Issue 6 PART 1, 1998, Pages 2789-2798

  Schanwald, L P ^a   Schwank, J R ^a   Sniegowski, J J ^a   Walsh, D S ^a   Smith, N F ^a   Peterson, K A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON IRRADIATION; ENGINES; FAILURE ANALYSIS; MECHANICAL DRIVES; MICROMACHINING; PROTON IRRADIATION; RADIATION EFFECTS; X RAYS;

COMB DRIVES; MICROENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032311701     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/23.736529     Document Type: Article

References (16)

1. W. C. TangMEMS Applications in Space Exploration," Proc. of SPIE Micromachined Devices and Components 111, Vol. 3224, Austin, Sept. 29-39, 1997, pp. 202-211, 0277-786X/97.
2. J. H. Comtois, M. A. Michalicek, C.C. BarronFabricating Micro-Instruments in SurfaceMicromachined Poly-crystalline Silicon," Proc. of the 43' International Instrumentation Symposium, Instrument Society of America, 1997, pp. 169-78.
3. J. J. Sniegowski and E. J. GarciaMicrofabricated Actuators and Their Application to Optics," Proceedings SPIE Miniaturized Systems with Micro-Optics and Micromechanics, Vol. 2383, San Jose, CA, Feb. 7-9, 1995 pp. 46-64.
4. A. R. Knudson, S. Buchner, P. McDonald, W. J. Stapor, A. B. Campbell, K. S. Grabowski, and D. L. KniesThe Effects of Radiation On MEMS Accelerometers," IEEE Trans. Nucl. Sei. Vol. 43 (6), Dec. 1996. pp. 3122-3126.
5. C. I. Lee, A. H. Johnson, \V. C. Tang, and C. E. Barnes, 'Total Dose Effects on Micr-oelectro-mcchanical Systems (MEMS): Accelerometers." IEEE Trans. Nucl Sei. Vol. 43 (6), Dec. 1996, pp. 3127-3132.
6. M. S. Rodgers, J. J. Sniegowski, S. L. Miller, C. C. Barren and P. J. McWhorterAdvanced Micromcchanisms in a Multi-level Polysilicon Technology," Proc. of SPIE Micromachined Devices and Components III Vol. 3224, Austin, Sept. 29-39, 1997, pp. 120-130, 0277-786X/97.
7. S. L. Miller, J. J. Sniegowski, G. EaVigne and P. J. McWhorterFriction in Surface Micromachined Microengines," Proc. of SPIE Smart Electronics and MEMS, Vol. 2722, San Diego, Feb. 28-29, 1996, pp. 197204.
8. D. M. Tanner, W. M. Miller, W. P. Eaton, L. W. Irwin, K. A. Peterson, M. T. Dugger, D. C. Senft, N. F. Smith, P. Tangyunyong and S. L. MillerThe Effect of Frequency on the Lifetime of a Surface Micromachined Microcnginc Driving a Load," 1998 IEEE International Reliability Physics Symposium, Reno, MV, March 30 - April 2, 1998, pp. 26-35.
9. S. L. Miller, G. LaVignc, M. S. Rodgers, J. J. Sniegowski, J. P. Walters and P. J. McWhorter "Routes to Failure in Rotating MEMS Devices Experiencing Sliding Friction," Proc. of SPIE Micromachined Devices and Components 111, Vol. 3224, Austin, Sept. 29-39, 1997, pp. 24-30, 0277-786X/97.
10. R. Maboudian and R. T. HowcStiction Reduction Processes for Surface Micromachines," Tribology Letters 3, 1997, pp. 215-221.
11. C. Linder, E. Zimniermann and N. F. DeRooij. "Capacitive Polysilicon Resonator with MOS Detection Circuit," Sensors and Actuators A, Vol. 25-27, 1991, pp. 592-595.
12. H. P. Neff, Jr., Basic Electromagnetic Fields, ©1981, Harper & Row, p. 116.
13. S. A. Campbell. The Science and Engineering of Microelectronic Fabrication, ©1996, Oxford University Press, p. 206.
14. J. R. Schwank, S. B. Roeske, D.E. Beuller, D. J. Moreno and M. R. ShaneyfeltA Dose Rale Independent pMOS Dosimeter for Space Applications," IEEE Trans. Nucl. Sei., Vol. 43 (6), Dec. 1996, pp. 2671-78.
15. R. C. Hughes and W. R. Dawes, Jr.Dual Dielectric Silicon Metal-Oxide-Semiconduclor Field-Effect Transistors as Radiation Sensors," J. Appl. Phys., 65 (5), March 1. 1989, pp. 1972-76.
16. H. E. Boesch, Jr. and C. A. PermiseMeasurement and Modeling of Radiation Response of Multilayer BESOi Buried Insulators," IEEE Trans. Nucl. Sei., Vol. 41 (6), Dec. 1994, pp. 2322-31.