Full characterisation of pull-in in single-sided clamped beams

Sensors and Actuators, A: Physical

Volumn 110, Issue 1-3, 2004, Pages 301-309

  Rocha, L A ^a   Cretu, E ^a,b   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Melexis ^*  (Belgium)

Author keywords

DC voltage reference; MEMS stability; Pull in; Reproducibility

Indexed keywords

ACCELEROMETERS; BUCKLING; CAPACITORS; DEFLECTION (STRUCTURES); DEGREES OF FREEDOM (MECHANICS); DIELECTRIC MATERIALS; ELASTIC MODULI; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; RESIDUAL STRESSES; SPURIOUS SIGNAL NOISE; STIFFNESS; STRESS RELAXATION; THERMAL CYCLING;

CLAMPED BEAMS; DC VOLTAGE REFERENCE; MICROELECTROMECHANICAL SYSTEM (MEMS) STABILITY; PULL-IN PHENOMENA; REPRODUCIBILITY;

ELECTROSTATIC ACTUATORS;

EID: 1642484923     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.09.023     Document Type: Conference Paper

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