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Volumn 41, Issue 3-5, 2003, Pages 313-335
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On forces in microelectromechanical systems
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Author keywords
Electromagnetics; Forces; Microelectromechanical systems; Molecular interactions
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Indexed keywords
ELECTRIC LOADS;
ELECTRODYNAMICS;
INTERFACES (MATERIALS);
QUANTUM THEORY;
MAGNETIC LOADINGS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0037335455
PISSN: 00207225
EISSN: None
Source Type: Journal
DOI: 10.1016/S0020-7225(02)00207-0 Document Type: Conference Paper |
Times cited : (42)
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References (17)
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