Highly reliable silicon micromachined physical sensors in mass production

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 714-717

  Sasayama, Takao ^a   Suzuki, Seikoo ^a   Tsuchitani, Shigeki ^a   Koide, Akira ^a   Suzuki, Masayoshi ^a   Nakazawa, Terumi ^a   Ichikawa, Norio ^a  

^a HITACHI LTD   (Japan)

Author keywords

Accelerometers; Micromachining; Physical sensors; Silicon; Surface force

Indexed keywords

EID: 0040935202     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80044-1     Document Type: Article

References (5)

1. T. Sasayama, S. Tsuchitani and S. Ugai, Micro-machined silicon physical sensors, Denshi Tokyo (English J. IEEE Tokyo Section), 33 (1994) 176-183.
2. S. Suzuki, S. Tsuchitani, K. Sato, S. Naito, S. Ueno, M. Suzuki, N. Ichikawa and M. Sato, Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique, SAE Paper No. 910274 (1991).
3. S. Tsuchitani, S. Suzuki, B. Kloeck, M. Miki, M. Matsumoto, K. Sato and A. Koide, Study of the behavior of the seismic mass of a PWM electrostatic servo accelerometer, Trans. Soc. Instrumentation and Control Engineering (SICE), 29 (1993) 288-294 (in Japanese).
4. T. Sasayama, Sensors and sensing technology for intelligent vehicle era, Proc. Automotive Electronics, C481/028/94, IME, London, 1994, pp. 61-67.
5. A. Koide, K. Sato, S. Suzuki and M. Miki, A multi-step anisotropic etching process for producing 3-D silicon accelerometers, Tech. Digest, 11th Sensor Symp., Japan, 1992, pp. 23-26.