SCOPUS 정보 검색 플랫폼

Volumn 56, Issue 10, 2002, Pages 527-542

Printing meets lithography: Soft approaches to high-resolution patterning

(13) Michel, Bruno a Bernard, André a Bietsch, Alexander a Delamarche, Emmanuel a Geissler, Mattias a Juncker, David a Kind, Hannes a Renault, Jean Philippe a Rothuizen, Hugo a Schmid, Heinz a Schmidt Winkel, Patrick a Stutz, Richard a Wolf, Heiko a

a IBM RESEARCH ZURICH (Switzerland)

Author keywords

Biopattern; Elastomeric; Electroless; Flexography; High resolution; Light stamp; Microcontact print; Microfluidic; Mold; Nanopattern; PDMS; Soft lithography

Indexed keywords

THIOL;

ACCURACY; ARCHITECTURE; ARTICLE; CATALYST; LABORATORY; LIQUID; LITHOGRAPHY; NANOTECHNOLOGY; PRINTING; TECHNIQUE;

EID: 0036425982 PISSN: 00094293 EISSN: None Source Type: Journal
DOI: 10.2533/000942902777680207 Document Type: Article

Times cited : (35)

References (113)

1
- 0007506060
- Museum Rietberg, Gablerstr. 15, 8002 Zurich Switzerland
- R. Goepper, J. Lee-Kalisch, 'Korea: Die Alten Königreiche', Kulturstiftung Ruhr Essen (Katalog). Museum Rietberg, Gablerstr. 15, 8002 Zurich, Switzerland, 2000, p. 258
- (2000) Korea: Die Alten Königreiche, Kulturstiftung Ruhr Essen (Katalog) , pp. 258
- Goepper, R.¹ Lee-Kalisch, J.²

2
- 0004001221
- Springer, Berlin
- H. Kipphan, 'Handbuch der Printmedien: Technologien und Produktionsverfahren', Springer, Berlin, 2000.
- (2000) Handbuch der Printmedien: Technologien und Produktionsverfahren
- Kipphan, H.¹

3
- 31544437601
- Delmare Publishers, Albany, NY
- J.M. Adams, D.D. Faux, J.J. Rieber, 'Printing Technology', 4th Ed., Delmare Publishers, Albany, NY, 1996.
- (1996) Printing Technology, 4th Ed.
- Adams, J.M.¹ Faux, D.D.² Rieber, J.J.³

4
- 0000658150
- S. Leppävuori, J. Vaeaenaenen, M. Lahti, J. Remes, A. Uusimaeki, Sensors and Actuators A 1994, 41-42, 593.
- (1994) Sensors and Actuators A , vol.41-42 , pp. 593
- Leppävuori, S.¹ Vaeaenaenen, J.² Lahti, M.³ Remes, J.⁴ Uusimaeki, A.⁵

5
- 0344642480
- M. Lahti, S. Leppävuori, V. Lantto, Appl. Surf. Sci. 1999, 142, 367.
- (1999) Appl. Surf. Sci. , vol.142 , pp. 367
- Lahti, M.¹ Leppävuori, S.² Lantto, V.³

6
- 0028393269
- Y. Mikami, Y. Nagae, Y. Mori, K. Kubawara, T. Saito, H. Hayama, H. Asada, Y. Akimoto, M. Kobayashi, S. Okazaki, K. Asaka, H. Matsui, K. Nakamura, E. Kaneko, IEEE Trans. Electron. Dev. 1994, 41, 306.
- (1994) IEEE Trans. Electron. Dev. , vol.41 , pp. 306
- Mikami, Y.¹ Nagae, Y.² Mori, Y.³ Kubawara, K.⁴ Saito, T.⁵ Hayama, H.⁶ Asada, H.⁷ Akimoto, Y.⁸ Kobayashi, M.⁹ Okazaki, S.¹⁰ Asaka, K.¹¹ Matsui, H.¹² Nakamura, K.¹³ Kaneko, E.¹⁴

7
- 85000380769
- Tokyo, Japan
- P.M. Harrey, P.S.A. Evans, B.J. Ramsey, D. Harrison, in 'Proc. 1st Intl. Symp. On Environmentally Conscious Designs and Inverse Manufacturing, Tokyo, Japan, 1999, p. 842.
- (1999) Proc. 1st Intl. Symp. On Environmentally Conscious Designs and Inverse Manufacturing , pp. 842
- Harrey, P.M.¹ Evans, P.S.A.² Ramsey, B.J.³ Harrison, D.⁴

8
- 0030398258
- IEEE, Piscataway, NJ
- G. Love, G. Maher, N. Long, in 'Proc. IEEE Intl. Electronic Manufacturing Technology (IEMT)', IEEE, Piscataway, NJ, 1996, p. 167.
- (1996) Proc. IEEE Intl. Electronic Manufacturing Technology (IEMT) , pp. 167
- Love, G.¹ Maher, G.² Long, N.³

9
- 77954964680
- H. Gleskova, E.Y. Ma, S. Wagner, D.S. Shen, in '1996 Display Manufacturing Technology Conference. Digest of Technical Papers', 1996, p. 97.
- (1996) 1996 Display Manufacturing Technology Conference. Digest of Technical Papers , pp. 97
- Gleskova, H.¹ Ma, E.Y.² Wagner, S.³ Shen, D.S.⁴

10
- 85036898949
- San Jose, CA
- R.H. Detig, in 'Proc. Display Works 99, Manufacturing Technology Conference', San Jose, CA, 1999, p. 97.
- (1999) Proc. Display Works 99, Manufacturing Technology Conference , pp. 97
- Detig, R.H.¹

11
- 0033221865
- R.W. Sabnis, Displays 1999, 20, 119.
- (1999) Displays , vol.20 , pp. 119
- Sabnis, R.W.¹

12
- 0022059718
- E. Cullmann, Semicond. Int. 1985, 8, 332.
- (1985) Semicond. Int. , vol.8 , pp. 332
- Cullmann, E.¹

13
- 0001983366
- H. Huber, U. Scheunemann, E. Cullmann, W. Rohrmoser, Solid State Technol. 1990, 33, 59.
- (1990) Solid State Technol. , vol.33 , pp. 59
- Huber, H.¹ Scheunemann, U.² Cullmann, E.³ Rohrmoser, W.⁴

14
- 0003666012
- John Wiley & Sons, New York
- S.K. Ghandi, 'VLSI Fabrication Principles', John Wiley & Sons, New York, 1983.
- (1983) VLSI Fabrication Principles
- Ghandi, S.K.¹

15
- 0030717858
- G.L.T. Chiu, J.M. Shaw, IBM J. Res Develop. 1997, 41, 3.
- (1997) IBM J. Res Develop. , vol.41 , pp. 3
- Chiu, G.L.T.¹ Shaw, J.M.²

16
- 51149210777
- A. Kumar, G.M. Whitesides, Appl. Phys. Lett. 1993, 63, 2002.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2002
- Kumar, A.¹ Whitesides, G.M.²

17
- 0001036325
- A. Kumar, N.L. Abbott, E. Kim, H. Biebuyck, G.M. Whitesides, Acc. Chem. Res. 1995, 28, 219.
- (1995) Acc. Chem. Res. , vol.28 , pp. 219
- Kumar, A.¹ Abbott, N.L.² Kim, E.³ Biebuyck, H.⁴ Whitesides, G.M.⁵

18
- 0031556576
- E. Delamarche, A.C.F. Hoole, B. Michel, S. Wilkes, M. Despont, M.E. Welland, H.A. Biebuyck, J. Phys. Chem. 1997, 101, 9263.
- (1997) J. Phys. Chem. , vol.101 , pp. 9263
- Delamarche, E.¹ Hoole, A.C.F.² Michel, B.³ Wilkes, S.⁴ Despont, M.⁵ Welland, M.E.⁶ Biebuyck, H.A.⁷

19
- 0030653742
- H.A. Biebuyck, N.B. Larsen, E. Delamarche, B. Michel, IBM J. Res. Develop. 1997, 41, 159.
- (1997) IBM J. Res. Develop. , vol.41 , pp. 159
- Biebuyck, H.A.¹ Larsen, N.B.² Delamarche, E.³ Michel, B.⁴

20
- 0031947320
- Y. Xia, G.M. Whitesides, Angew. Chem. Int. Ed. 1998, 37, 550.
- (1998) Angew. Chem. Int. Ed. , vol.37 , pp. 550
- Xia, Y.¹ Whitesides, G.M.²

21
- 0001672959
- S. Walheim, R. Muller, M. Sprenger, E. Loser, J. Mlynek, Adv. Mater. 1999, 11, 1431.
- (1999) Adv. Mater. , vol.11 , pp. 1431
- Walheim, S.¹ Muller, R.² Sprenger, M.³ Loser, E.⁴ Mlynek, J.⁵

22
- 0011300548
- N.L. Jeon, I.S. Choni, G.M. Whitesides, N.Y. Kim, P.E. Laibinis, Y. Harada, K.R. Finnie, G.S. Girolami, R.G. Nuzzo, Appl. Phys. Lett. 1999, 75, 4201.
- (1999) Appl. Phys. Lett. , vol.75 , pp. 4201
- Jeon, N.L.¹ Choni, I.S.² Whitesides, G.M.³ Kim, N.Y.⁴ Laibinis, P.E.⁵ Harada, Y.⁶ Finnie, K.R.⁷ Girolami, G.S.⁸ Nuzzo, R.G.⁹

23
- 0342914504
- D. Qin, Y. Xia, B. Xu, H. Yang, C. Zhu, G.M. Whitesides, Adv. Mater. 1999, 11, 1433.
- (1999) Adv. Mater. , vol.11 , pp. 1433
- Qin, D.¹ Xia, Y.² Xu, B.³ Yang, H.⁴ Zhu, C.⁵ Whitesides, G.M.⁶

24
- 0033514211
- R.J. Jackman, S.T. Brittain, A. Adams, H. Wu, M.G. Prentiss, S. Whitesides, G.M. Whitesides, Langmuir 1999, 15, 826.
- (1999) Langmuir , vol.15 , pp. 826
- Jackman, R.J.¹ Brittain, S.T.² Adams, A.³ Wu, H.⁴ Prentiss, M.G.⁵ Whitesides, S.⁶ Whitesides, G.M.⁷

25
- 0034661892
- T. Deng, H.K. Wu, S.T. Brittain, G.M. Whitesides, Anal. Chem. 2000, 72, 3176.
- (2000) Anal. Chem. , vol.72 , pp. 3176
- Deng, T.¹ Wu, H.K.² Brittain, S.T.³ Whitesides, G.M.⁴

26
- 0033877980
- R.R. Shah, D. Merreceyes, M. Husemann, I. Rees, N.L. Abbott, C.J. Hawker, J.L. Hedrick, Macromolecules 2000, 33, 597.
- (2000) Macromolecules , vol.33 , pp. 597
- Shah, R.R.¹ Merreceyes, D.² Husemann, M.³ Rees, I.⁴ Abbott, N.L.⁵ Hawker, C.J.⁶ Hedrick, J.L.⁷

27
- 0034677844
- W.T.S. Huck, A.D. Strook, G.M. Whitesides, Angew. Chem. Int. Ed. 2000, 39, 1058.
- (2000) Angew. Chem. Int. Ed. , vol.39 , pp. 1058
- Huck, W.T.S.¹ Strook, A.D.² Whitesides, G.M.³

28
- 0034294314
- A.J. Black, P.F. Nealey, J.H. Thywissen, M. Deshpande, N. El-Zein, G.N. Maracas, M. Prentiss, G.M. Whitesides, Sensors and Actuators A 2000, 86, 96.
- (2000) Sensors and Actuators A , vol.86 , pp. 96
- Black, A.J.¹ Nealey, P.F.² Thywissen, J.H.³ Deshpande, M.⁴ El-Zein, N.⁵ Maracas, G.N.⁶ Prentiss, M.⁷ Whitesides, G.M.⁸

29
- 0142037327
- S.Y. Chou, P.R. Krauss, P.J. Renstrom, Appl. Phys. Lett. 1995, 67, 3114.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3114
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

30
- 0030570065
- S.Y. Chou, P.R. Krauss, P.J. Renstrom, Science 1996, 272, 85.
- (1996) Science , vol.272 , pp. 85
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

31
- 0033130730
- A. Lebib, Y. Chen, J. Bourneix, F. Carcenac, E. Cambril, L. Couraud, H. Launois, Microelectron. Eng. 1999, 46, 319.
- (1999) Microelectron. Eng. , vol.46 , pp. 319
- Lebib, A.¹ Chen, Y.² Bourneix, J.³ Carcenac, F.⁴ Cambril, E.⁵ Couraud, L.⁶ Launois, H.⁷

32
- 0034207339
- A. Lebib, Y. Chen, F. Carcenac, E. Cambril, L. Manin, L. Couraud, H. Launois, Microelectron. Eng. 2000, 53, 175.
- (2000) Microelectron. Eng. , vol.53 , pp. 175
- Lebib, A.¹ Chen, Y.² Carcenac, F.³ Cambril, E.⁴ Manin, L.⁵ Couraud, L.⁶ Launois, H.⁷

33
- 0033891137
- '16th European Conference on Mask Technology for Integrated Circuits and Microcomponents', Ed. U.F. Behringer
- H. Schulz, F. Osenberg, J. Engemann, H.-C. Scheer, in '16th European Conference on Mask Technology for Integrated Circuits and Microcomponents', Ed. U.F. Behringer, Proc. SPIE 2000, 3996, p. 244.
- (2000) Proc. SPIE , vol.3996 , pp. 244
- Schulz, H.¹ Osenberg, F.² Engemann, J.³ Scheer, H.-C.⁴

34
- 0034207492
- H. Schift, C. David, M. Gabriel, J. Gobrecht, L.J. Heyderman, W. Kaiser, S. Koeppel, L. Scandella, Microelectron. Eng. 2000, 53, 171.
- (2000) Microelectron. Eng. , vol.53 , pp. 171
- Schift, H.¹ David, C.² Gabriel, M.³ Gobrecht, J.⁴ Heyderman, L.J.⁵ Kaiser, W.⁶ Koeppel, S.⁷ Scandella, L.⁸

35
- 0033682555
- 'Emerging Lithographic Technologies IV', Ed. E.A. Dobisz
- L. Montelius, B. Heidari, M. Graczyk, T. Ling, I. Maximov, E.L. Sarwe, in 'Emerging Lithographic Technologies IV', Ed. E.A. Dobisz, Proc. SPIE 2000, 3997, 442.
- (2000) Proc. SPIE , vol.3997 , pp. 442
- Montelius, L.¹ Heidari, B.² Graczyk, M.³ Ling, T.⁴ Maximov, I.⁵ Sarwe, E.L.⁶

36
- 0032712529
- O.J.A. Schueller, S.T. Brittain, G.M. Whitesides, Sensors & Actuators A 1999, 72, 125.
- (1999) Sensors & Actuators A , vol.72 , pp. 125
- Schueller, O.J.A.¹ Brittain, S.T.² Whitesides, G.M.³

37
- 0033531047
- O.J.A. Schueller, X.M. Zhao, G.M. Whitesides, S. P. Smith, M. Prentiss, Adv. Mater. 1999, 11, 37.
- (1999) Adv. Mater. , vol.11 , pp. 37
- Schueller, O.J.A.¹ Zhao, X.M.² Whitesides, G.M.³ Smith, S.P.⁴ Prentiss, M.⁵

38
- 0032630811
- B. Xu, F. Arias, G.M. Whitesides, Adv. Mater. 1999, 11, 492.
- (1999) Adv. Mater. , vol.11 , pp. 492
- Xu, B.¹ Arias, F.² Whitesides, G.M.³

39
- 0034615958
- M.A. Unger, H.P. Chou, T. Thorsen, A. Scherer, S.R. Quake, Science 2000, 288, 113.
- (2000) Science , vol.288 , pp. 113
- Unger, M.A.¹ Chou, H.P.² Thorsen, T.³ Scherer, A.⁴ Quake, S.R.⁵

40
- 0034188179
- C. Bechinger, H. Muffler, C. Schäfle, O. Sundberg, P. Leiderer, Thin Solid Films 2000, 366, 135.
- (2000) Thin Solid Films , vol.366 , pp. 135
- Bechinger, C.¹ Muffler, H.² Schäfle, C.³ Sundberg, O.⁴ Leiderer, P.⁵

41
- 0033698147
- 'Emerging Lithographic Technologies IV', Ed. E.A. Dobisz
- M. Colburn, A. Grot, M. Amistoso, B.J. Cho, T. Bailey, J. Ekerdt, S.V. Sreenivasan, J. Hollenhorst, G.C. Willson, in 'Emerging Lithographic Technologies IV', Ed. E.A. Dobisz, Proc. SPIE 2000, 3997, 453.
- (2000) Proc. SPIE , vol.3997 , pp. 453
- Colburn, M.¹ Grot, A.² Amistoso, M.³ Cho, B.J.⁴ Bailey, T.⁵ Ekerdt, J.⁶ Sreenivasan, S.V.⁷ Hollenhorst, J.⁸ Willson, G.C.⁹

42
- 0000604549
- A. Bietsch, B. Michel, J. Appl. Phys. 2000, 88, 4310.
- (2000) J. Appl. Phys. , vol.88 , pp. 4310
- Bietsch, A.¹ Michel, B.²

43
- 0033742531
- H. Schmid, B. Michel, Macromolecules 2000, 33, 3042.
- (2000) Macromolecules , vol.33 , pp. 3042
- Schmid, H.¹ Michel, B.²

44
- 0030231504
- Y. Xia, X.-M. Zhao, G.M. Whitesides, Microelectron. Eng. 1996, 32, 255.
- (1996) Microelectron. Eng. , vol.32 , pp. 255
- Xia, Y.¹ Zhao, X.-M.² Whitesides, G.M.³

45
- 0031547532
- N.B. Larsen, H.A. Biebuyck, E. Delamarche, and B. Michel, J. Am. Chem. Soc. 1997, 119, 3017.
- (1997) J. Am. Chem. Soc. , vol.119 , pp. 3017
- Larsen, N.B.¹ Biebuyck, H.A.² Delamarche, E.³ Michel, B.⁴

46
- 0001565068
- E. Delamarche, H. Schmid, A. Bietsch, N.B. Larsen, H. Rothuizen, B. Michel, H.A. Biebuyck, J. Phys. Chem. B 1998, 102, 3324.
- (1998) J. Phys. Chem. B , vol.102 , pp. 3324
- Delamarche, E.¹ Schmid, H.² Bietsch, A.³ Larsen, N.B.⁴ Rothuizen, H.⁵ Michel, B.⁶ Biebuyck, H.A.⁷

47
- 0032800080
- L. Libioulle, A. Bietsch, H. Schmid, B. Michel, E. Delamarche, Langmuir 1999, 15, 300.
- (1999) Langmuir , vol.15 , pp. 300
- Libioulle, L.¹ Bietsch, A.² Schmid, H.³ Michel, B.⁴ Delamarche, E.⁵

48
- 0029275735
- J.L. Wilbur, H.A. Biebuyck, J.C. McDonald, G.M. Whitesides, Langmuir 1994, 11, 825.
- (1994) Langmuir , vol.11 , pp. 825
- Wilbur, J.L.¹ Biebuyck, H.A.² McDonald, J.C.³ Whitesides, G.M.⁴

49
- 0001011768
- G.P. Lopez, H.A. Biebuyck, G.M. Whitesides, Langmuir 1993, 9, 1513.
- (1993) Langmuir , vol.9 , pp. 1513
- Lopez, G.P.¹ Biebuyck, H.A.² Whitesides, G.M.³

50
- 84975440458
- A. Kumar, H.A. Biebuyck, N.L. Abbott, G.M. Whitesides, J. Am. Chem. Soc. 1992, 114, 9188.
- (1992) J. Am. Chem. Soc. , vol.114 , pp. 9188
- Kumar, A.¹ Biebuyck, H.A.² Abbott, N.L.³ Whitesides, G.M.⁴

51
- 0030246280
- E. Delamarche, B. Michel, H. Biebuyck, C. Gerber, Adv. Mater. 1996, 8, 719.
- (1996) Adv. Mater. , vol.8 , pp. 719
- Delamarche, E.¹ Michel, B.² Biebuyck, H.³ Gerber, C.⁴

52
- 0033195438
- G. Schmidt, M. Tormen, G. Mueller, L.W. Molenkamp, Y. Chen, A. Lebib, H. Launois, Electron. Lett. 1999, 35, 1731.
- (1999) Electron. Lett. , vol.35 , pp. 1731
- Schmidt, G.¹ Tormen, M.² Mueller, G.³ Molenkamp, L.W.⁴ Chen, Y.⁵ Lebib, A.⁶ Launois, H.⁷

53
- 0034205513
- Y. Chen, A. Lebib, F. Carcenac, H. Launois, G. Schmidt, M. Tormen, G. Mueller, L.W. Molenkamp, M. Liebau, J. Huskens, S.N. Reinhoudt, Microeletron. Eng. 2000, 53, 253.
- (2000) Microeletron. Eng. , vol.53 , pp. 253
- Chen, Y.¹ Lebib, A.² Carcenac, F.³ Launois, H.⁴ Schmidt, G.⁵ Tormen, M.⁶ Mueller, G.⁷ Molenkamp, L.W.⁸ Liebau, M.⁹ Huskens, J.¹⁰ Reinhoudt, S.N.¹¹

54
- 0031552575
- E. Delamarche, H. Schmid, B. Michel, H. Biebuyck, Adv. Mater. 1997, 9, 741.
- (1997) Adv. Mater. , vol.9 , pp. 741
- Delamarche, E.¹ Schmid, H.² Michel, B.³ Biebuyck, H.⁴

55
- 85040875608
- Cambridge University Press, Cambridge, England
- K.L. Johnson, 'Contact Mechanics', Cambridge University Press, Cambridge, England, 1985.
- (1985) Contact Mechanics
- Johnson, K.L.¹

56
- 0033977251
- C.D. James, R. Davies, M. Meyer, A. Turner, S. Turner, G. Withers, L. Kam, G. Banker, H. Craighead, M. Isaacson, J. Turner, W. Shain, IEEE Trans. Biomed. Eng. 2000, 47, 17.
- (2000) IEEE Trans. Biomed. Eng. , vol.47 , pp. 17
- James, C.D.¹ Davies, R.² Meyer, M.³ Turner, A.⁴ Turner, S.⁵ Withers, G.⁶ Kam, L.⁷ Banker, G.⁸ Craighead, H.⁹ Isaacson, M.¹⁰ Turner, J.¹¹ Shain, W.¹²

57
- 0033098870
- A. Folch, M.A. Schmidt, J. Microelectromech. Syst. 1999, 8, 85.
- (1999) J. Microelectromech. Syst. , vol.8 , pp. 85
- Folch, A.¹ Schmidt, M.A.²

58
- 0031683340
- J.A. Rogers, K.E. Paul, G.M. Whitesides, J. Vac. Sci. Technol. B 1998, 16, 88.
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 88
- Rogers, J.A.¹ Paul, K.E.² Whitesides, G.M.³

59
- 0033707161
- T. Burgin, V.-E. Choong, G. Maracas, Langmuir 2000, 16, 5371.
- (2000) Langmuir , vol.16 , pp. 5371
- Burgin, T.¹ Choong, V.-E.² Maracas, G.³

60
- 0000705615
- 'Tenth International Workshop on the Physics of Semiconductor Devices', Eds. V. Kumar, S.K. Agarwal
- R. Hull, D. Longo, in 'Tenth International Workshop on the Physics of Semiconductor Devices', Eds. V. Kumar, S.K. Agarwal, Proc. SPIE 2000, 3975, p. 974.
- (2000) Proc. SPIE , vol.3975 , pp. 974
- Hull, R.¹ Longo, D.²

61
- 0034188031
- A. Bietsch, M.A. Schneider, M.E. Welland, B. Michel, J. Vac. Sci. Technol. B 2000, 18, 1160.
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1160
- Bietsch, A.¹ Schneider, M.A.² Welland, M.E.³ Michel, B.⁴

62
- 79956041451
- A. Bietsch, B. Michel, Appl. Phys. Lett. 2002, 80, 3346.
- (2002) Appl. Phys. Lett. , vol.80 , pp. 3346
- Bietsch, A.¹ Michel, B.²

63
- 0011262379
- J.F. Bacilek, IS&T Ann. Conf. 1997, 242.
- (1997) IS&T Ann. Conf. , vol.242
- Bacilek, J.F.¹

64
- 0000242759
- R.J. Jackman, J. Duffy, E. Ostuni, N.D. Willmore, G.M. Whitesides, Anal. Chem. 1998, 70, 2280.
- (1998) Anal. Chem. , vol.70 , pp. 2280
- Jackman, R.J.¹ Duffy, J.² Ostuni, E.³ Willmore, N.D.⁴ Whitesides, G.M.⁵

65
- 0030035841
- E. Kim, Y. Xia, G.M. Whitesides, J. Am. Chem. Soc. 1996, 118, 5722.
- (1996) J. Am. Chem. Soc. , vol.118 , pp. 5722
- Kim, E.¹ Xia, Y.² Whitesides, G.M.³

66
- 0030948781
- E. Delamarche, A. Bernard, H. Schmid, B. Michel, H. Biebuyck, Science 1997, 276, 779.
- (1997) Science , vol.276 , pp. 779
- Delamarche, E.¹ Bernard, A.² Schmid, H.³ Michel, B.⁴ Biebuyck, H.⁵

67
- 0032573880
- E. Delamarche, A. Bernard, H. Schmid, A. Bietsch, B. Michel, H. Biebuyck, J. Am. Chem. Soc. 1998, 120, 500.
- (1998) J. Am. Chem. Soc. , vol.120 , pp. 500
- Delamarche, E.¹ Bernard, A.² Schmid, H.³ Bietsch, A.⁴ Michel, B.⁵ Biebuyck, H.⁶

68
- 0000848775
- E. Delamarche, B. Michel, A. Bernard, H. Schmid, E. Haskal, W. Riess, IBM Tech. Disclosure Bull. 2000, 436, 1443.
- (2000) IBM Tech. Disclosure Bull. , vol.436 , pp. 1443
- Delamarche, E.¹ Michel, B.² Bernard, A.³ Schmid, H.⁴ Haskal, E.⁵ Riess, W.⁶

69
- 0003705919
- Academic Press, Inc., New York
- G.T. Hermanson, A.K. Mallia, P.K. Smith, 'Immobilized Affinity Ligand Techniques', Academic Press, Inc., New York, 1992.
- (1992) Immobilized Affinity Ligand Techniques
- Hermanson, G.T.¹ Mallia, A.K.² Smith, P.K.³

70
- 0034333620
- A. Folch, J.B. Ho, O. Hurtado, D.J. Beebe, M. Toner, J. Biomed. Mater. Res. 2000, 52, 346.
- (2000) J. Biomed. Mater. Res. , vol.52 , pp. 346
- Folch, A.¹ Ho, J.B.² Hurtado, O.³ Beebe, D.J.⁴ Toner, M.⁵

71
- 0033555467
- B.H. Weigl, P. Yager, Science 1999, 283, 346.
- (1999) Science , vol.283 , pp. 346
- Weigl, B.H.¹ Yager, P.²

72
- 0032524099
- M.U. Kopp, A.J. de Mello, A. Manz, Science 1998, 280, 1046.
- (1998) Science , vol.280 , pp. 1046
- Kopp, M.U.¹ De Mello, A.J.² Manz, A.³

73
- 0032050524
- A. Bernard, E. Delamarche, H. Schmid, B. Michel, H.R. Bosshard, H. Biebuyck, Langmuir 1998, 14, 2225.
- (1998) Langmuir , vol.14 , pp. 2225
- Bernard, A.¹ Delamarche, E.² Schmid, H.³ Michel, B.⁴ Bosshard, H.R.⁵ Biebuyck, H.⁶

74
- 0031998702
- C.D. James, R.C. Davis, L. Kam, H.G. Craighead, M. Isaacson, J.N. Turner, W. Shain, Langmuir 1998, 14, 741.
- (1998) Langmuir , vol.14 , pp. 741
- James, C.D.¹ Davis, R.C.² Kam, L.³ Craighead, H.G.⁴ Isaacson, M.⁵ Turner, J.N.⁶ Shain, W.⁷

75
- 22844436154
- A. Bernard, J.P. Renault, B. Michel, H.R. Bosshard, E. Delamarche, Adv. Mater 2000, 12, 1067.
- (2000) Adv. Mater. , vol.12 , pp. 1067
- Bernard, A.¹ Renault, J.P.² Michel, B.³ Bosshard, H.R.⁴ Delamarche, E.⁵

76
- 0034608906
- M. Geissler, A. Bernard, A. Bietsch, H. Schmid, B. Michel, E. Delamarche, J. Am. Chem. Soc. 2000, 122, 6303.
- (2000) J. Am. Chem. Soc. , vol.122 , pp. 6303
- Geissler, M.¹ Bernard, A.² Bietsch, A.³ Schmid, H.⁴ Michel, B.⁵ Delamarche, E.⁶

77
- 0003835724
- American Electroplaters and Surface Finishers Society, Orlando, FL
- G.O. Mallory, J.B. Hajdu, 'Electroless Plating: Fundamentals and Applications', American Electroplaters and Surface Finishers Society, Orlando, FL, 1990.
- (1990) Electroless Plating: Fundamentals and Applications
- Mallory, G.O.¹ Hajdu, J.B.²

78
- 0028336573
- W.J. Dressick, C.S. Dulcey, J.H. Georger, G.S. Calabrese, J.M. Calvert, J. Electrochem. Soc. 1994, 141, 210.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 210
- Dressick, W.J.¹ Dulcey, C.S.² Georger, J.H.³ Calabrese, G.S.⁴ Calvert, J.M.⁵

79
- 0032166446
- E.J. O'Sullivan, A.G. Schrott, M. Paunovic, C.J. Sambucetti, J.R. Marino, P.J. Bailey, S. Kaja, K.W. Semkow, IBM J. Res. Develop. 1998, 42, 607.
- (1998) IBM J. Res. Develop. , vol.42 , pp. 607
- O'Sullivan, E.J.¹ Schrott, A.G.² Paunovic, M.³ Sambucetti, C.J.⁴ Marino, J.R.⁵ Bailey, P.J.⁶ Kaja, S.⁷ Semkow, K.W.⁸

80
- 0000730481
- P.C. Hidber, W. Helbig, E. Kim, G.M. Whitesides, Langmuir 1996, 12, 1375.
- (1996) Langmuir , vol.12 , pp. 1375
- Hidber, P.C.¹ Helbig, W.² Kim, E.³ Whitesides, G.M.⁴

81
- 0034248008
- H. Kind, M. Geissler, H. Schmid, B. Michel, K. Kern, E. Delamarche, Langmuir 2000, 16, 6367.
- (2000) Langmuir , vol.16 , pp. 6367
- Kind, H.¹ Geissler, M.² Schmid, H.³ Michel, B.⁴ Kern, K.⁵ Delamarche, E.⁶

82
- 0000380740
- H. Schmid, H. Biebuyck, B. Michel, O.J.F. Martin, N. Piller, J. Vac. Sci. Technol. B 1998, 16, 3422.
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3422
- Schmid, H.¹ Biebuyck, H.² Michel, B.³ Martin, O.J.F.⁴ Piller, N.⁵

83
- 0032073945
- H. Schmid, H. Biebuyck, B. Michel, O.J.F. Martin, Appl. Phys. Lett. 1998, 72, 2379.
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2379
- Schmid, H.¹ Biebuyck, H.² Michel, B.³ Martin, O.J.F.⁴

84
- 0000330290
- J.A. Rogers, K.E. Paul, R.J. Jackman, G.M. Whitesides, Appl. Phys. Lett. 1997, 70, 2685.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2685
- Rogers, J.A.¹ Paul, K.E.² Jackman, R.J.³ Whitesides, G.M.⁴

85
- 0000018130
- J.A. Rogers, A. Dodabalapur, Z. Bao, H. Katz, Appl. Phys. Lett. 1999, 75, 1010.
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1010
- Rogers, J.A.¹ Dodabalapur, A.² Bao, Z.³ Katz, H.⁴

86
- 0033133108
- Y. Chen, F. Carcenac, C. Ecoffe, D.J. Lougnot, H. Launois, Microelectron. Eng. 1999, 46, 69.
- (1999) Microelectron. Eng. , vol.46 , pp. 69
- Chen, Y.¹ Carcenac, F.² Ecoffe, C.³ Lougnot, D.J.⁴ Launois, H.⁵

87
- 0032159761
- O.J.F. Martin, N.P. Piller, Phys. Rev. E 1998, 58, 3909.
- (1998) Phys. Rev. E , vol.58 , pp. 3909
- Martin, O.J.F.¹ Piller, N.P.²

88
- 0000667616
- O.J.F. Martin, N.B. Piller, H. Schmid, H. Biebuyck, B. Michel, Opt. Express 1998, 3, 280.
- (1998) Opt. Express , vol.3 , pp. 280
- Martin, O.J.F.¹ Piller, N.B.² Schmid, H.³ Biebuyck, H.⁴ Michel, B.⁵

89
- 0033265204
- M. Paulus, B. Michel, O.J.F. Martin, J. Vac. Sci. Technol. B 1999, 17, 3314.
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3314
- Paulus, M.¹ Michel, B.² Martin, O.J.F.³

90
- 0034205562
- J.G. Goodberlet, B.L. Dunn, Microelectron. Eng. 2000, 53, 95.
- (2000) Microelectron. Eng. , vol.53 , pp. 95
- Goodberlet, J.G.¹ Dunn, B.L.²

91
- 0033133109
- R.J. Blaikie, M.M. Alkaisi, S.J. McNab, D.R.S. Cumming, R. Cheung, D.G. Hasko, Microelectron. Eng. 1999, 46, 85.
- (1999) Microelectron. Eng. , vol.46 , pp. 85
- Blaikie, R.J.¹ Alkaisi, M.M.² McNab, S.J.³ Cumming, D.R.S.⁴ Cheung, R.⁵ Hasko, D.G.⁶

92
- 0032686695
- 'Emerging Lithographic Technologies III, Ed. Y. Vladimirsky
- D.J.D. Carter, H.I. Smith, K.W. Rhee, C. Marrian, in 'Emerging Lithographic Technologies III, Ed. Y. Vladimirsky, Proc. SPIE 1999, 3676, p. 70.
- (1999) Proc. SPIE , vol.3676 , pp. 70
- Carter, D.J.D.¹ Smith, H.I.² Rhee, K.W.³ Marrian, C.⁴

93
- 0029357345
- E. Kim, Y. Xia, G.M. Whitesides, Nature 1995, 376, 581.
- (1995) Nature , vol.376 , pp. 581
- Kim, E.¹ Xia, Y.² Whitesides, G.M.³

94
- 0030035841
- E. Kim, Y. Xia, G.M. Whitesides, J. Am. Chem. Soc. 1996, 118, 5722.
- (1996) J. Am. Chem. Soc. , vol.118 , pp. 5722
- Kim, E.¹ Xia, Y.² Whitesides, G.M.³

95
- 0030263409
- X.M. Zhao, Y. Xia, G.M. Whitesides, Adv. Mater. 1996, 8, 837.
- (1996) Adv. Mater. , vol.8 , pp. 837
- Zhao, X.M.¹ Xia, Y.² Whitesides, G.M.³

96
- 0033362634
- H. Kind, J.M. Bonard, C. Emmenegger, L.O. Nilsson, K. Hernadi, E. Maillard-Schaller, L. Schlapbach, L. Forro, K. Kern, Adv. Mater. 1999, 11, 1285.
- (1999) Adv. Mater. , vol.11 , pp. 1285
- Kind, H.¹ Bonard, J.M.² Emmenegger, C.³ Nilsson, L.O.⁴ Hernadi, K.⁵ Maillard-Schaller, E.⁶ Schlapbach, L.⁷ Forro, L.⁸ Kern, K.⁹

97
- 0034248128
- H. Kind, J. M. Bonard, L. Forro, K. Kern, K. Hernadi, L.O. Nilsson, L. Schlapbach, Langmuir 2000, 16, 6877.
- (2000) Langmuir , vol.16 , pp. 6877
- Kind, H.¹ Bonard, J.M.² Forro, L.³ Kern, K.⁴ Hernadi, K.⁵ Nilsson, L.O.⁶ Schlapbach, L.⁷

98
- 0033199692
- A. Cassell, N.R. Franklin, T.W. Tombler, E.M. Chan, J. Han, H. Dai, J. Am. Chem. Soc. 1999, 121, 7975.
- (1999) J. Am. Chem. Soc. , vol.121 , pp. 7975
- Cassell, A.¹ Franklin, N.R.² Tombler, T.W.³ Chan, E.M.⁴ Han, J.⁵ Dai, H.⁶

99
- 0001577714
- S.Y. Chou, L. Zhuang, L. Guo, Appl. Phys. Lett. 1999, 75, 1004.
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1004
- Chou, S.Y.¹ Zhuang, L.² Guo, L.³

100
- 0038470648
- E. Schäffer, T. Thurn-Albrecht, T.P. Russell, U. Steiner, Nature 2000, 403, 874.
- (2000) Nature , vol.403 , pp. 874
- Schäffer, E.¹ Thurn-Albrecht, T.² Russell, T.P.³ Steiner, U.⁴

101
- 0031257364
- J. Tien, A. Terfort, G.M. Whitesides, Langmuir 1997, 13, 5349.
- (1997) Langmuir , vol.13 , pp. 5349
- Tien, J.¹ Terfort, A.² Whitesides, G.M.³

102
- 0035793890
- H.O. Jacobs, G.M. Whitesides, Science 2001, 291, 1763.
- (2001) Science , vol.291 , pp. 1763
- Jacobs, H.O.¹ Whitesides, G.M.²

103
- 0034621827
- S.R. Whaley, S.D. English, E.L. Hu, P.F. Barbara, A.M. Belcher, Nature 2000, 405, 665.
- (2000) Nature , vol.405 , pp. 665
- Whaley, S.R.¹ English, S.D.² Hu, E.L.³ Barbara, P.F.⁴ Belcher, A.M.⁵

104
- 0032293999
- IEEE, Piscataway, NJ
- D.E. Ackley, M.J. Heller, C.F. Edman, in 'Proc. LEOS'98, 11th Annual Meeting IEEE Lasers and Electro Optics Society', IEEE, Piscataway, NJ, 1998, p. 85.
- (1998) Proc. LEOS'98, 11th Annual Meeting IEEE Lasers and Electro Optics Society , pp. 85
- Ackley, D.E.¹ Heller, M.J.² Edman, C.F.³

105
- 0032301550
- N.L. Jeon, J. Hu, G.M. Whitesides, M.K. Erhardt, R.G. Nuzzo, Adv. Mater. 1998, 10, 1466.
- (1998) Adv. Mater. , vol.10 , pp. 1466
- Jeon, N.L.¹ Hu, J.² Whitesides, G.M.³ Erhardt, M.K.⁴ Nuzzo, R.G.⁵

106
- 0031556442
- J. Hu, R.G. Beck, T. Deng, R.M. Westervelt, K.D. Maranowski, A.C. Gossard, G.M. Whitesides, Appl. Phys. Lett. 1997, 71, 2020.
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2020
- Hu, J.¹ Beck, R.G.² Deng, T.³ Westervelt, R.M.⁴ Maranowski, K.D.⁵ Gossard, A.C.⁶ Whitesides, G.M.⁷

107
- 0033075199
- L.B. Goetting, T. Deng, G.M. Whitesides, Langmuir 1999, 15, 1182.
- (1999) Langmuir , vol.15 , pp. 1182
- Goetting, L.B.¹ Deng, T.² Whitesides, G.M.³

108
- 12944273602
- J. Tate, J.A. Rogers, C.D.W. Jones, B. Vyas, D.W. Murphy, L. Wenjie, B. Zhenans, R. E. Slusher, A. Dodabalapur, H.E. Katz, Langmuir 2000, 16, 6054.
- (2000) Langmuir , vol.16 , pp. 6054
- Tate, J.¹ Rogers, J.A.² Jones, C.D.W.³ Vyas, B.⁴ Murphy, D.W.⁵ Wenjie, L.⁶ Zhenans, B.⁷ Slusher, R.E.⁸ Dodabalapur, A.⁹ Katz, H.E.¹⁰

109
- 0002839819
- S.T. Brittain, P.J.A. Kenis, O.J.A. Schueller, R.J. Jackman, G.M. Whitesides, Abstr. Papers Am. Chem. Soc. 1998, 216, 43.
- (1998) Abstr. Papers Am. Chem. Soc. , vol.216 , pp. 43
- Brittain, S.T.¹ Kenis, P.J.A.² Schueller, O.J.A.³ Jackman, R.J.⁴ Whitesides, G.M.⁵

110
- 0032656868
- W.S. Beh, I.T. Kim, D. Qin, Y. Xia, G.M. Whitesides, Adv. Mater. 1999, 11, 1038.
- (1999) Adv. Mater. , vol.11 , pp. 1038
- Beh, W.S.¹ Kim, I.T.² Qin, D.³ Xia, Y.⁴ Whitesides, G.M.⁵

111
- 0003552056
- Semiconductor Industry Association, Austin, TX
- 'The National Technology Roadmap for Semiconductors', Semiconductor Industry Association, Austin, TX, 1997.
- (1997) The National Technology Roadmap for Semiconductors

112
- 0034326045
- J.M. Xu, Syn. Mater. 2000, 115, 1.
- (2000) Syn. Mater. , vol.115 , pp. 1
- Xu, J.M.¹

113
- 0034554418
- J.A. Rogers, J. Tate, W.J. Li, Z. Bao, A. Dodabalapur, Israel J. Chem. 2000, 40, 139.
- (2000) Israel J. Chem. , vol.40 , pp. 139
- Rogers, J.A.¹ Tate, J.² Li, W.J.³ Bao, Z.⁴ Dodabalapur, A.⁵

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