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Volumn 15, Issue 3, 1999, Pages 826-834

Three-Dimensional Metallic Microstructures Fabricated by Soft Lithography and Microelectrodeposition

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ELECTRODEPOSITION; FORMING; LITHOGRAPHY;

EID: 0033514211     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la980857y     Document Type: Article
Times cited : (49)

References (43)
  • 6
    • 0004181625 scopus 로고    scopus 로고
    • CRC Press: Boca Raton, FL
    • For overview see: Madou, M. Fundamentals of Microfabrication; CRC Press: Boca Raton, FL, 1997. Kovacs, G. T. A. Micromachined Transducers Sourcebook; WCB McGraw-Hill: New York, 1998.
    • (1997) Fundamentals of Microfabrication
    • Madou, M.1
  • 7
    • 0004169367 scopus 로고    scopus 로고
    • WCB McGraw-Hill: New York
    • For overview see: Madou, M. Fundamentals of Microfabrication; CRC Press: Boca Raton, FL, 1997. Kovacs, G. T. A. Micromachined Transducers Sourcebook; WCB McGraw-Hill: New York, 1998.
    • (1998) Micromachined Transducers Sourcebook
    • Kovacs, G.T.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.