Fabrication of glassy carbon microstructures by soft lithography

Sensors and Actuators, A: Physical

Volumn 72, Issue 2, 1999, Pages 125-139

  Schneller, Olivier J A ^a   Brittain, Scott T ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

Glassy carbon; Microfabrication; Soft lithography

Indexed keywords

AMORPHOUS MATERIALS; CARBON; DEFORMATION; ELECTROPLATING; FABRICATION; ORGANIC POLYMERS; PLASTIC MOLDS; PLASTICS MOLDING;

GLASSY CARBON MICROSTRUCTURES; MICROFABRICATION; SOFT LITHOGRAPHY;

LITHOGRAPHY;

EID: 0032712529     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0924-4247(98)00218-0     Document Type: Article

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