Large area submicrometer contact printing using a contact aligner

Langmuir

Volumn 16, Issue 12, 2000, Pages 5371-5375

  Burgin, Timothy ^a   Choong, Vi En ^a   Maracas, George ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; GOLD; METHANOL; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SILICA; SILICON; SUBSTRATES; SURFACES; TANTALUM COMPOUNDS;

MICROCONTACT PRINTING; STAMP ALIGNER;

THIN FILMS;

EID: 0033707161     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la000038p     Document Type: Article

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