Microfabrication of two layer structures of electrically isolated wires using self-assembly to guide the deposition of insulating organic polymer

Sensors and Actuators, A: Physical

Volumn 86, Issue 1-2, 2000, Pages 96-102

  Black, Andrew J ^a   Nealey, Paul F ^b   Thywissen, Joseph H ^c   Deshpande, Mandar ^d   El Zein, Nada ^d   Maracas, George N ^d   Prentiss, Mara ^c   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

^b University of Wisconsin ^*  (United States)

^c HARVARD UNIVERSITY   (United States)

^d MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC COILS; ELECTRIC INDUCTORS; LITHOGRAPHY; ORGANIC POLYMERS;

LIQUID POLYMERS; MICROCONTACT PRINTING; SOFT LITHOGRAPHY;

INSULATED WIRE;

EID: 0034294314     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00422-2     Document Type: Article

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