Large area nanoimprint fabrication of sub-100 nm interdigitated metal arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 442-452

  Montelius, L ^a   Heidari, B ^a   Graczyk, M ^a   Ling, T ^a   Maximov, I ^a   Sarwe, E L ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONIC PROCESSING; MICROSENSORS; NANOTECHNOLOGY; SPECTROSCOPY; ULTRAVIOLET RADIATION;

INTERDIGITATED METAL ARRAYS; NANOIMPRINT FABRICATION;

PHOTOLITHOGRAPHY;

EID: 0033682555     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)