Quantifying distortions in soft lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 88-97

  Rogers, John A ^a   Paul, Kateri E ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; DEFORMATION; ELASTOMERS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; MOIRE FRINGES; SUBSTRATES; SURFACES;

MOIRE PATTERNS; PERIODICITY; POLYDIMETHYLSILOXANE; SOFT LITHOGRAPHY;

LITHOGRAPHY;

EID: 0031683340     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589841     Document Type: Article

References (11)

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3. X.-M. Zhao, Y. Xia, and G. M. Whitesides, Adv. Mater. 8, 837 (1996).
4. Y. Xia, E. Kim, X.-M. Zhao, J. A. Rogers, M. Prentiss, and G. M. Whitesides, Science 273, 347 (1996).
5. Y. Xia, J. J. McClelland, R. Gupta, D. Qin, X.-M. Zhao, L. L. Sohn, R. J. Celotta, and G. M. Whitesides, Adv. Mater. 9, 147 (1997).
6. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, Appl. Phys. Lett. 70, 2658 (1997); J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, J. Vac. Sci. Technol. B, these proceedings.
7. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, Appl. Phys. Lett. 70, 2658 (1997); J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, J. Vac. Sci. Technol. B, these proceedings.
8. X.-M. Zhao, J. L. Wilbur, and G. M. Whitesides, Langmuir 12, 3257 (1996).
9. K. Patorski, Handbook of the Moiré Fringe Technique (Elsevier, New York, 1993).
10. Elastomeric elements of PDMS spontaneously "wet" clean glass surfaces. This "wetting" causes the elements to stick to the glass; they can be removed nondestructively by peeling them off by hand.
11. 3] and a platinum complex as cross linking agents and catalysts, respectively, for the hydrosilation reaction. The first of these components is referred to as the prepolymer, and the second as the curing agent. To form the elastomer, the two parts are mixed together at room temperature, and then held at 65°C for 2 hours. The amount of curing agent determines the extent of cross linking in the polymer, and therefore affects the modulus of the material. As might be expected, we observed that the modulus increased with increasing amounts of curing agent; we did not measure the differences. Experiments described in this article were conducted with the elastomer formed with 1:5 and 1:20 parts curing agent to prepolymer by weight.