Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching

Langmuir

Volumn 15, Issue 4, 1999, Pages 1182-1191

  Goetting, Laura B ^a   Deng, Tao ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETIC ACID; ALUMINA; CAPACITANCE; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC RESISTANCE MEASUREMENT; ETCHING; NITRIC ACID; PHOSPHORIC ACID; SILICON NITRIDE; SILICON WAFERS;

ALKANEPHOSPHONIC ACID; MICROCONTACT PRINTING; WET CHEMICAL ETCHING;

ALUMINUM;

EID: 0033075199     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la981094h     Document Type: Article

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