Light-coupling masks: An alternative, lensless approach to high-resolution optical contact lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3422-3425

  Schmid, Heinz ^a   Biebuyck, Hans ^a   Michel, Bruno ^a   Martin, Olivier J F ^b   Piller, Nicolas B ^b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000380740     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590471     Document Type: Article

References (13)

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4. E. Delamarche, H. Schmid, B. Michel, and H. Biebuyck, Adv. Mater. 9, 741 (1997).
5. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, Appl. Phys. Lett. 70, 2658 (1997).
6. O. J. F. Martin and N. P. Piller, Phys. Rev. E 58, 3909 (1998); O. J. F. Martin, C. Girard, and A. Dereux, Phys. Rev. Lett. 74, 526 (1995); for an animation of these results, see O. J. F. Martin et al., Opt. Express 7, 280 (28 Sept. 1998) (on line).
7. O. J. F. Martin and N. P. Piller, Phys. Rev. E 58, 3909 (1998); O. J. F. Martin, C. Girard, and A. Dereux, Phys. Rev. Lett. 74, 526 (1995); for an animation of these results, see O. J. F. Martin et al., Opt. Express 7, 280 (28 Sept. 1998) (on line).
8. O. J. F. Martin and N. P. Piller, Phys. Rev. E 58, 3909 (1998); O. J. F. Martin, C. Girard, and A. Dereux, Phys. Rev. Lett. 74, 526 (1995); for an animation of these results, see O. J. F. Martin et al., Opt. Express 7, 280 (28 Sept. 1998) (on line).
9. J. Aizenberg, J. A. Rogers, K. E. Paul, and G. M. Whitesides, Appl. Phys. Lett. 71, 3773 (1997).
10. Special issue on Optical Lithography, IBM J. Res. Dev. 41, No. 1/2 (1997).
11. H. Schmid and B. Michel (preprints available).
12. E. Cullmann, K. Cooper, and C. Reyerse, Suss Report (Karl Suss America, Waterbury Center, VT, 1991), Vol. 5. No. 3, p. 1.
13. Y. Xia and G. M. Whitesides, Angew. Chem. Int. Ed. Engl. 37, 550 (1998).