SiC device technology for high voltage and RF power applications

2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings

Volumn 1, Issue , 2002, Pages 31-39

  Ostling M ^a   Koo, S M ^a   Lee, S K ^a   Danielsson, E ^a   Domeij, M ^a   Zetterling, C M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY KTH   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; SUBSTRATES;

ECONOMICALLY VIABLE; EXPERIMENTAL DEVICES; FABRICATION TECHNIQUE; PROCESS TECHNOLOGIES; RADIATION RESISTANT; RF POWER APPLICATIONS; SILICON CARBIDES (SIC); STATE OF THE ART;

SILICON CARBIDE;

EID: 84879354490     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIEL.2002.1003145     Document Type: Conference Paper

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