Improved inversion channel mobility for 4H-SiC MOSFETs following high temperature anneals in nitric oxide

IEEE Electron Device Letters

Volumn 22, Issue 4, 2001, Pages 176-178

  Chung, G Y ^b   Tin, C C ^b   Williams, J R ^b   McDonald, K ^c   Chanana, R K ^c   Weller, Robert A ^a,d   Pantelides, S T ^c,e   Feldman, Leonard C ^a,c,e   Holland, O W ^e   Das, M K ^f   Palmour, John W ^a,f  

^a IEEE

^b AUBURN UNIVERSITY   (United States)

^c VANDERBILT UNIVERSITY   (United States)

^d VANDERBILT UNIVERSITY   (United States)

^e OAK RIDGE NATIONAL LABORATORY   (United States)

^f Arkansas Power Electronics International Inc   (United States)

Author keywords

Interface states; Mobility; MOSFETs; Nitridation; Oxidation; Silicon carbide

Indexed keywords

ANNEALING; BANDWIDTH; CAPACITANCE; CARRIER MOBILITY; CHANNEL CAPACITY; ELECTRIC CONDUCTANCE; ELECTRIC POTENTIAL; FABRICATION; INTERFACES (MATERIALS); PASSIVATION; SILICA; SILICON CARBIDE;

INVERSION CHANNEL MOBILITY; TRAP DENSITY;

MOSFET DEVICES;

EID: 0035310635     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.915604     Document Type: Article

References (15)

1. Status of silicon carbide (SiC) as a wide band gap semiconductor for high temperature applications: A review
2. Significantly improved performance of MOSFET's on silicon carbide using the 15R-SiC polytype
3. 2 interface states
4. 2 interface state density for nitrogen doped 4H and 6H-SiC
5. 2/4H-SiC MOS devices
6. 2 interface
7. 2 grown on SiC by rapid thermal processing
8. Effect of nitric oxide annealing on the interface trap densities near the band edges in the 4H polytype of silicon carbide
9. Interface state densities near the conduction band edge in n-type 4H- and 6H-SiC
10. 2/SiC defects
11. 2/SiC interface
12. Electron mobility in inversion and accumulation layers on thermally oxidized silicon surfaces
13. Lateral n-channel inversion mode 4H-SiC MOSFETs
14. Channel doped SiC MOSFETs
15. Anisotropy of inversion channel mobility in 4H- and 6H-SiC MOSFET's on (1120) face