-
1
-
-
77956548030
-
The role of non-equilibrium plasmas and micro-discharges in top down nanotechnologies and self-organized assembly of nanostructures
-
Belgrade, Serbia
-
Z. L. Petrovic, G. Malovic, M. Radmilovic-Radjenovic, N. Puac, D. Maric, P. Maguire, and C. Mahony, "The role of non-equilibrium plasmas and micro-discharges in top down nanotechnologies and self-organized assembly of nanostructures," in Proc. IEEE 25th Int. Conf. Microelectron., Belgrade, Serbia, 2006, vol. 1/2, pp. 39-46.
-
(2006)
Proc. IEEE 25th Int. Conf. Microelectron
, vol.1-2
, pp. 39-46
-
-
Petrovic, Z.L.1
Malovic, G.2
Radmilovic-Radjenovic, M.3
Puac, N.4
Maric, D.5
Maguire, P.6
Mahony, C.7
-
2
-
-
49949084271
-
Surface science of plasma exposed surfaces: A challenge for applied plasma science
-
Sep
-
K. Ostrikov, "Surface science of plasma exposed surfaces: A challenge for applied plasma science," Vacuum, vol. 83, no. 1, pp. 4-10, Sep. 2008.
-
(2008)
Vacuum
, vol.83
, Issue.1
, pp. 4-10
-
-
Ostrikov, K.1
-
3
-
-
35648936418
-
Self-organized nanostructures on atmospheric microplasma exposed surfaces
-
Oct
-
D. Mariotti, V. Švrček, and D.-G. Kim, "Self-organized nanostructures on atmospheric microplasma exposed surfaces," Appl. Phys. Lett., vol. 91, no. 18, p. 183 111, Oct. 2007.
-
(2007)
Appl. Phys. Lett
, vol.91
, Issue.18
, pp. 183-111
-
-
Mariotti, D.1
Švrček, V.2
Kim, D.-G.3
-
4
-
-
53949102915
-
Self-organized nanoarrays: Plasma-related controls
-
K. Ostrikov, I. Levchenko, and S. Xu, "Self-organized nanoarrays: Plasma-related controls," Pure Appl. Chem., vol. 80, no. 9, pp. 1909-1918, 2008.
-
(2008)
Pure Appl. Chem
, vol.80
, Issue.9
, pp. 1909-1918
-
-
Ostrikov, K.1
Levchenko, I.2
Xu, S.3
-
5
-
-
56949089545
-
Self-organized carbon interconnections between Ag nanoparticles via atmospheric microplasma synthesis
-
I. Levchenko, K. Ostrikov, and D. Mariotti, "Self-organized carbon interconnections between Ag nanoparticles via atmospheric microplasma synthesis," Carbon, vol. 47, pp. 344-347, 2009.
-
(2009)
Carbon
, vol.47
, pp. 344-347
-
-
Levchenko, I.1
Ostrikov, K.2
Mariotti, D.3
-
6
-
-
55849124388
-
Plasma-driven self-organization of Ni nanodot arrays on Si (100
-
Nov
-
I. Levchenko, K. Ostrikov, K. Diwan, K. Winkler, and D. Mariotti, "Plasma-driven self-organization of Ni nanodot arrays on Si (100 ," Appl. Phys. Lett., vol. 93, no. 18, p. 183 102, Nov. 2008.
-
(2008)
Appl. Phys. Lett
, vol.93
, Issue.18
, pp. 183-102
-
-
Levchenko, I.1
Ostrikov, K.2
Diwan, K.3
Winkler, K.4
Mariotti, D.5
-
7
-
-
27744559911
-
Microcavity plasma devices and arrays: A new realm of plasma physics and photonic applications
-
Dec
-
J. G. Eden and S.-J. Park, "Microcavity plasma devices and arrays: A new realm of plasma physics and photonic applications," Plasma Phys. Control. Fusion, vol. 47, no. 12B, pp. B83-B92, Dec. 2005.
-
(2005)
Plasma Phys. Control. Fusion
, vol.47
, Issue.12 B
-
-
Eden, J.G.1
Park, S.-J.2
-
8
-
-
33644954351
-
Evolution of discharge structure in capacitive radio-frequency atmospheric microplasmas
-
Mar
-
J. J. Shi and M. G. Kong, "Evolution of discharge structure in capacitive radio-frequency atmospheric microplasmas," Phys. Rev. Lett., vol. 96, no. 10, p. 105 009, Mar. 2006.
-
(2006)
Phys. Rev. Lett
, vol.96
, Issue.10
, pp. 105-009
-
-
Shi, J.J.1
Kong, M.G.2
-
9
-
-
67650286150
-
Characterization of the microplasma regime: Sheath thickness
-
unpublished
-
A. Wagner, K. Yurchenko, and D. Mariotti, Characterization of the microplasma regime: Sheath thickness. unpublished.
-
-
-
Wagner, A.1
Yurchenko, K.2
Mariotti, D.3
-
10
-
-
42349098604
-
Non-equilibrium and effect of gas mixtures in an atmospheric microplasma
-
Apr
-
D. Mariotti, "Non-equilibrium and effect of gas mixtures in an atmospheric microplasma," Appl. Phys. Lett., vol. 92, no. 15, p. 151 505, Apr. 2008.
-
(2008)
Appl. Phys. Lett
, vol.92
, Issue.15
, pp. 151-505
-
-
Mariotti, D.1
-
11
-
-
35348899573
-
Electron and ion kinetics in a DC microplasma at atmospheric pressure
-
Oct
-
J. Choi, F. Iza, J. K. Lee, and C.-M. Ryu, "Electron and ion kinetics in a DC microplasma at atmospheric pressure," IEEE Trans. Plasma Sci., vol. 35, no. 5, pp. 1274-1278, Oct. 2007.
-
(2007)
IEEE Trans. Plasma Sci
, vol.35
, Issue.5
, pp. 1274-1278
-
-
Choi, J.1
Iza, F.2
Lee, J.K.3
Ryu, C.-M.4
-
12
-
-
33846329483
-
Gas temperature and electron temperature measurements by emission spectroscopy for an atmospheric microplasma
-
Jan
-
D. Mariotti, Y. Shimizu, T. Sasaki, and N. Koshizaki, "Gas temperature and electron temperature measurements by emission spectroscopy for an atmospheric microplasma," J. Appl. Phys., vol. 101, no. 1, p. 013 307, Jan. 2007.
-
(2007)
J. Appl. Phys
, vol.101
, Issue.1
, pp. 013-307
-
-
Mariotti, D.1
Shimizu, Y.2
Sasaki, T.3
Koshizaki, N.4
-
13
-
-
35348994992
-
Spatially resolved temperature measurements of atmospheric-pressure normal glow microplasmas in air
-
Oct
-
D. Staack, B. Farouk, A. F. Gutsol, and A. Fridman, "Spatially resolved temperature measurements of atmospheric-pressure normal glow microplasmas in air," IEEE Trans. Plasma Sci., vol. 35, no. 5, pp. 1448-1455, Oct. 2007.
-
(2007)
IEEE Trans. Plasma Sci
, vol.35
, Issue.5
, pp. 1448-1455
-
-
Staack, D.1
Farouk, B.2
Gutsol, A.F.3
Fridman, A.4
-
14
-
-
31144475911
-
Microplasmas and applications
-
Feb
-
K. H. Becker, K. H. Schoenbach, and J. G. Eden, "Microplasmas and applications," J. Phys. D, Appl. Phys., vol. 39, no. 3, pp. R55-R70, Feb. 2006.
-
(2006)
J. Phys. D, Appl. Phys
, vol.39
, Issue.3
-
-
Becker, K.H.1
Schoenbach, K.H.2
Eden, J.G.3
-
15
-
-
9944245572
-
Analysis of excitation processes and electron temperature changes from spectral data in a dc micro plasma discharge
-
Nov
-
D. Mariotti, P. Maguire, C.M. O. Mahony, and J. A. McLaughlin, "Analysis of excitation processes and electron temperature changes from spectral data in a dc micro plasma discharge," Plasma Sources Sci. Technol., vol. 13, no. 4, pp. 576-581, Nov. 2004.
-
(2004)
Plasma Sources Sci. Technol
, vol.13
, Issue.4
, pp. 576-581
-
-
Mariotti, D.1
Maguire, P.2
Mahony, C.M.O.3
McLaughlin, J.A.4
-
16
-
-
34548062338
-
Electron kinetics in radio-frequency atmospheric-pressure microplasmas
-
Aug
-
F. Iza, J. K. Lee, and M. G. Kong, "Electron kinetics in radio-frequency atmospheric-pressure microplasmas," Phys. Rev. Lett. vol. 99, no. 7, p. 075 004, Aug. 2007.
-
(2007)
Phys. Rev. Lett
, vol.99
, Issue.7
, pp. 075-004
-
-
Iza, F.1
Lee, J.K.2
Kong, M.G.3
-
18
-
-
33846086951
-
Flow rate effect on the structure and morphology of molybdenum oxide nanoparticles deposited by atmospheric-pressure microplasma processing
-
Dec
-
A. C. Bose, Y. Shimizu, D. Mariotti, T. Sasaki, K. Terashima, and N. Koshizaki, "Flow rate effect on the structure and morphology of molybdenum oxide nanoparticles deposited by atmospheric-pressure microplasma processing," Nanotechnology, vol. 17, no. 24, pp. 5976-5982, Dec. 2006.
-
(2006)
Nanotechnology
, vol.17
, Issue.24
, pp. 5976-5982
-
-
Bose, A.C.1
Shimizu, Y.2
Mariotti, D.3
Sasaki, T.4
Terashima, K.5
Koshizaki, N.6
-
19
-
-
58149267809
-
3 nanosheets produced by atmospheric microplasma: Application to lithium-ion batteries
-
Dec
-
3 nanosheets produced by atmospheric microplasma: Application to lithium-ion batteries," Nanotechnology, vol. 19, no. 49, p. 495 302, Dec. 2008.
-
(2008)
Nanotechnology
, vol.19
, Issue.49
, pp. 495-302
-
-
Mariotti, D.1
Lindström, H.2
Bose, A.C.3
Ostrikov, K.4
-
20
-
-
47349117669
-
Localized deposition of metallic molybdenum particles in ambient air using atmospheric-pressure microplasma
-
Y. Shimizu, K. Koga, T. Sasaki, D. Mariotti, K. Terashima, and N. Koshizaki, "Localized deposition of metallic molybdenum particles in ambient air using atmospheric-pressure microplasma," in Proc. Microprocesses Nanotechnol. Dig. Papers, 2007, pp. 174-175.
-
(2007)
Proc. Microprocesses Nanotechnol. Dig. Papers
, pp. 174-175
-
-
Shimizu, Y.1
Koga, K.2
Sasaki, T.3
Mariotti, D.4
Terashima, K.5
Koshizaki, N.6
-
21
-
-
33846041032
-
Reactive evaporation of metal wire and microdeposition of metal oxide using atmospheric pressure reactive microplasma jet
-
Y. Shimizu, A. C. Bose, T. Sasaki, D. Mariotti, K. Kirihara, T. Suzuki, K. Terashima, and N. Koshizaki, "Reactive evaporation of metal wire and microdeposition of metal oxide using atmospheric pressure reactive microplasma jet," Jpn. J. Appl. Phys., vol. 45, no. 10B, pp. 8228-8234, 2006.
-
(2006)
Jpn. J. Appl. Phys
, vol.45
, Issue.10 B
, pp. 8228-8234
-
-
Shimizu, Y.1
Bose, A.C.2
Sasaki, T.3
Mariotti, D.4
Kirihara, K.5
Suzuki, T.6
Terashima, K.7
Koshizaki, N.8
-
22
-
-
33644677743
-
Development of wire spraying for direct micro-patterning via an atmospheric-pressure UHF inductively coupled microplasma jet
-
Apr
-
Y. Shimizu, T. Sasaki, A. C. Bose, K. Terashima, and N. Koshizaki, "Development of wire spraying for direct micro-patterning via an atmospheric-pressure UHF inductively coupled microplasma jet," Surf. Coat. Technol., vol. 200, no. 14/15, pp. 4251-4256, Apr. 2006.
-
(2006)
Surf. Coat. Technol
, vol.200
, Issue.14-15
, pp. 4251-4256
-
-
Shimizu, Y.1
Sasaki, T.2
Bose, A.C.3
Terashima, K.4
Koshizaki, N.5
-
23
-
-
0037164781
-
3 nanobelts
-
Dec
-
3 nanobelts," Appl. Phys. Lett., vol. 81, no. 26, pp. 5048-5050, Dec. 2002.
-
(2002)
Appl. Phys. Lett
, vol.81
, Issue.26
, pp. 5048-5050
-
-
Li, Y.B.1
Bando, Y.2
Goldberg, D.3
Kurashima, K.4
-
24
-
-
28444436179
-
3 with different amounts of hydrogen to high surface area molybdenum oxides
-
Jan
-
3 with different amounts of hydrogen to high surface area molybdenum oxides," Appl. Catal., A Gen., vol. 297, no. 2, pp. 189-197, Jan. 2006.
-
(2006)
Appl. Catal., A Gen
, vol.297
, Issue.2
, pp. 189-197
-
-
Sakagami, H.1
Asano, Y.2
Ohno, T.3
Takahashi, N.4
Itoh, H.5
Matsuda, T.6
-
25
-
-
33748198645
-
Structural and optical properties of electrodeposited molybdenum oxide thin films
-
Sep
-
R. S. Patil, M. D. Uplane, and P. S. Patil, "Structural and optical properties of electrodeposited molybdenum oxide thin films," Appl. Surf. Sci., vol. 252, no. 23, pp. 8050-8056, Sep. 2006.
-
(2006)
Appl. Surf. Sci
, vol.252
, Issue.23
, pp. 8050-8056
-
-
Patil, R.S.1
Uplane, M.D.2
Patil, P.S.3
-
26
-
-
30344488762
-
3 films
-
Jan
-
3 films," Chem. Phys. Lett., vol. 418, no. 1-3, pp. 170-173, Jan. 2006.
-
(2006)
Chem. Phys. Lett
, vol.418
, Issue.1-3
, pp. 170-173
-
-
Sian, T.S.1
Reddy, G.B.2
-
27
-
-
0000726437
-
Photochromism induced in an electrolytically pretreated MoO3 thin film by visible light
-
Feb
-
J. N. Yao, K. Hashimoto, and A. Fujishima, "Photochromism induced in an electrolytically pretreated MoO3 thin film by visible light," Nature vol. 355, no. 6361, pp. 624-626, Feb. 1992.
-
(1992)
Nature
, vol.355
, Issue.6361
, pp. 624-626
-
-
Yao, J.N.1
Hashimoto, K.2
Fujishima, A.3
-
28
-
-
0038844237
-
Maskless etching of silicon using patterned microdischarges
-
Jul
-
R. M. Sankaran and K. P. Giapis, "Maskless etching of silicon using patterned microdischarges," Appl. Phys. Lett., vol. 79, no. 5, pp. 593-595, Jul. 2001.
-
(2001)
Appl. Phys. Lett
, vol.79
, Issue.5
, pp. 593-595
-
-
Sankaran, R.M.1
Giapis, K.P.2
-
29
-
-
0035973352
-
Multiple microscale plasma CVD apparatuses on a substrate
-
Jun
-
T. Ito and K. Terashima, "Multiple microscale plasma CVD apparatuses on a substrate," Thin Solid Films, vol. 390, no. 1, pp. 234-236, Jun. 2001.
-
(2001)
Thin Solid Films
, vol.390
, Issue.1
, pp. 234-236
-
-
Ito, T.1
Terashima, K.2
-
30
-
-
0035874099
-
Application of microscale plasma to material processing
-
May
-
T. Ito, T. Izaki, and K. Terashima, "Application of microscale plasma to material processing," Thin Solid Films, vol. 386, no. 2, pp. 300-304, May 2001.
-
(2001)
Thin Solid Films
, vol.386
, Issue.2
, pp. 300-304
-
-
Ito, T.1
Izaki, T.2
Terashima, K.3
-
31
-
-
18844424708
-
Control of uniformity of plasma-surface modification inside of small-diameter polyethylene tubing using microplasma diagnostics
-
Apr
-
J. L. Lauer, J. L. Shohet, R. M. Albrecht, S. Esnault, J. S. Malter, U. H. von Andrian, and S. B. Shohet, "Control of uniformity of plasma-surface modification inside of small-diameter polyethylene tubing using microplasma diagnostics," IEEE Trans. Plasma Sci., vol. 33, no. 2, pp. 791-798, Apr. 2005.
-
(2005)
IEEE Trans. Plasma Sci
, vol.33
, Issue.2
, pp. 791-798
-
-
Lauer, J.L.1
Shohet, J.L.2
Albrecht, R.M.3
Esnault, S.4
Malter, J.S.5
von Andrian, U.H.6
Shohet, S.B.7
-
32
-
-
50349083680
-
2 thin film coating on a capillary inner surface using atmospheric-pressure microplasma
-
Aug
-
2 thin film coating on a capillary inner surface using atmospheric-pressure microplasma," Surf. Coat. Technol., vol. 202, no. 22/23, pp. 5266-5270, Aug. 2008.
-
(2008)
Surf. Coat. Technol
, vol.202
, Issue.22-23
, pp. 5266-5270
-
-
Yoshiki, H.1
Mitsui, T.2
-
33
-
-
36248934728
-
2 ceramic films prepared by microplasma oxidation method
-
Dec
-
2 ceramic films prepared by microplasma oxidation method," J. Phys. Chem. Solids, vol. 68, no. 12, pp. 2387-2393, Dec. 2007.
-
(2007)
J. Phys. Chem. Solids
, vol.68
, Issue.12
, pp. 2387-2393
-
-
Xiaohong, W.1
Wei, Q.2
Xianbo, D.3
Yang, W.4
Huiling, L.5
Zhaohua, J.6
-
34
-
-
33846844917
-
Growth characteristics of micro-plasma oxidation ceramic coatings on Ti alloy by inductively coupled plasma-atomic emission spectrometer technique
-
Feb
-
Z. Yao, Z. Jiang, F. Wang, and W. Xue, "Growth characteristics of micro-plasma oxidation ceramic coatings on Ti alloy by inductively coupled plasma-atomic emission spectrometer technique," Appl. Surf. Sci., vol. 253, no. 9, pp. 4267-4272, Feb. 2007.
-
(2007)
Appl. Surf. Sci
, vol.253
, Issue.9
, pp. 4267-4272
-
-
Yao, Z.1
Jiang, Z.2
Wang, F.3
Xue, W.4
-
35
-
-
0346361804
-
Fabrication of spherical carbon via UHF inductively coupled microplasma CVD
-
Dec
-
Y. Shimizu, T. Sasaki, T. Ito, K. Terashima, and N. Koshizaki, "Fabrication of spherical carbon via UHF inductively coupled microplasma CVD," J. Phys. D, Appl. Phys., vol. 36, no. 23, pp. 2940-2944, Dec. 2003.
-
(2003)
J. Phys. D, Appl. Phys
, vol.36
, Issue.23
, pp. 2940-2944
-
-
Shimizu, Y.1
Sasaki, T.2
Ito, T.3
Terashima, K.4
Koshizaki, N.5
-
36
-
-
16244369726
-
Synthesis of blue luminescent Si nanoparticles using atmospheric-pressure microdischarges
-
Mar
-
R. M. Sankaran, D. Holunga, R. C. Flagan, and K. P. Giapis, "Synthesis of blue luminescent Si nanoparticles using atmospheric-pressure microdischarges," Nano Lett., vol. 5, no. 3, pp. 537-541, Mar. 2005.
-
(2005)
Nano Lett
, vol.5
, Issue.3
, pp. 537-541
-
-
Sankaran, R.M.1
Holunga, D.2
Flagan, R.C.3
Giapis, K.P.4
-
37
-
-
20544459129
-
Cylindrical metal wire surface coating with multiwalled carbon nanotubes by an atmospheric pressure microplasma CVD technique
-
May
-
Y. Shimizu, T. Sasaki, C. H. Liang, A. C. Bose, T. Ito, K. Terashima, and N. Koshizaki, "Cylindrical metal wire surface coating with multiwalled carbon nanotubes by an atmospheric pressure microplasma CVD technique," Chem. Vap. Depos., vol. 11, no. 5, pp. 244-249, May 2005.
-
(2005)
Chem. Vap. Depos
, vol.11
, Issue.5
, pp. 244-249
-
-
Shimizu, Y.1
Sasaki, T.2
Liang, C.H.3
Bose, A.C.4
Ito, T.5
Terashima, K.6
Koshizaki, N.7
-
38
-
-
28344456934
-
Synthesis of silicon nanocones using rf microplasma at atmospheric pressure
-
Oct
-
H. Shirai, T. Kobayashi, and Y. Hasegawa, "Synthesis of silicon nanocones using rf microplasma at atmospheric pressure," Appl. Phys. Lett., vol. 87, no. 14, p. 143 112, Oct. 2005.
-
(2005)
Appl. Phys. Lett
, vol.87
, Issue.14
, pp. 143-112
-
-
Shirai, H.1
Kobayashi, T.2
Hasegawa, Y.3
-
39
-
-
33846331117
-
Development of cross-flow micro-nebulizer for atmospheric pressure microplasma deposition and its application to prepare nano-carbon materials from alcohol
-
Y. Shimizu, A. C. Bose, T. Sasaki, D. Mariotti, K. Kirihara, T. Suzuki, K. Terashima, and N. Koshizaki, "Development of cross-flow micro-nebulizer for atmospheric pressure microplasma deposition and its application to prepare nano-carbon materials from alcohol," Trans. Mater. Res. Soc. Jpn., vol. 31, no. 2, pp. 463-466, 2006.
-
(2006)
Trans. Mater. Res. Soc. Jpn
, vol.31
, Issue.2
, pp. 463-466
-
-
Shimizu, Y.1
Bose, A.C.2
Sasaki, T.3
Mariotti, D.4
Kirihara, K.5
Suzuki, T.6
Terashima, K.7
Koshizaki, N.8
-
40
-
-
34547881942
-
Growth of vertically aligned carbon nanotube bundles using atmospheric-pressure microplasma
-
H. Yoshiki, T. Okada, K. Hirai, and R. Hatakeyama, "Growth of vertically aligned carbon nanotube bundles using atmospheric-pressure microplasma," Jpn. J. Appl. Phys., vol. 45, no. 12, pp. 9276-9279, 2006.
-
(2006)
Jpn. J. Appl. Phys
, vol.45
, Issue.12
, pp. 9276-9279
-
-
Yoshiki, H.1
Okada, T.2
Hirai, K.3
Hatakeyama, R.4
-
41
-
-
34249018565
-
Microplasma synthesis of tunable photoluminescent silicon nanocrystals
-
Jun
-
T. Nozaki, K. Sasaki, T. Ogino, D. Asahi, and K. Okazaki, "Microplasma synthesis of tunable photoluminescent silicon nanocrystals," Nanotechnology, vol. 18, no. 23, p. 235 603, Jun. 2007.
-
(2007)
Nanotechnology
, vol.18
, Issue.23
, pp. 235-603
-
-
Nozaki, T.1
Sasaki, K.2
Ogino, T.3
Asahi, D.4
Okazaki, K.5
-
42
-
-
34648833785
-
Microplasma synthesis of metal nanoparticles for gas-phase studies of catalyzed carbon nanotube growth
-
Sep
-
W.-H. Chiang and R. M. Sankaran, "Microplasma synthesis of metal nanoparticles for gas-phase studies of catalyzed carbon nanotube growth," Appl. Phys. Lett., vol. 91, no. 12, p. 121 503, Sep. 2007.
-
(2007)
Appl. Phys. Lett
, vol.91
, Issue.12
, pp. 121-503
-
-
Chiang, W.-H.1
Sankaran, R.M.2
-
43
-
-
33847033764
-
Synthesis of Si nanocones using rf microplasma at atmospheric pressure
-
Mar
-
Z. Yang, H. Shirai, T. Kobayashi, and Y. Hasegawa, "Synthesis of Si nanocones using rf microplasma at atmospheric pressure," Thin Solid Films, vol. 515, no. 9, pp. 4153-4158, Mar. 2007.
-
(2007)
Thin Solid Films
, vol.515
, Issue.9
, pp. 4153-4158
-
-
Yang, Z.1
Shirai, H.2
Kobayashi, T.3
Hasegawa, Y.4
-
44
-
-
34248570861
-
Plasma-aided nanofabrication: Where is the cutting edge
-
Apr
-
K. Ostrikov and A. B. Murphy, "Plasma-aided nanofabrication: Where is the cutting edge," J. Phys. D, Appl. Phys., vol. 40, no. 8, pp. 2223-2241, Apr. 2007.
-
(2007)
J. Phys. D, Appl. Phys
, vol.40
, Issue.8
, pp. 2223-2241
-
-
Ostrikov, K.1
Murphy, A.B.2
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45
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26244451229
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Colloquium: Reactive plasmas as a versatile nanofabrication tool
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Apr
-
K. Ostrikov, "Colloquium: Reactive plasmas as a versatile nanofabrication tool," Rev. Mod. Phys., vol. 77, no. 2, pp. 489-511, Apr. 2005.
-
(2005)
Rev. Mod. Phys
, vol.77
, Issue.2
, pp. 489-511
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-
Ostrikov, K.1
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