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Volumn 202, Issue 17, 2008, Pages 4130-4136
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Thermal stability studies of atmospheric plasma deposited siloxane films deposited on Vycor™ glass
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Author keywords
Atmospheric plasma; Particulates; Siloxane films; Surface roughness; Thermal stability
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Indexed keywords
CHEMICAL ANALYSIS;
CHEMICAL PROPERTIES;
FILMS;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GLASS;
HEAT TREATMENT;
PARTICLE SIZE;
SILICON COMPOUNDS;
SUBSTRATES;
SURFACE ROUGHNESS;
THERMODYNAMIC STABILITY;
X RAY PHOTOELECTRON SPECTROSCOPY;
ATMOSPHERIC PLASMA;
COATING CHEMISTRY;
SILICON SUBSTRATES;
SILOXANE FILMS;
PLASMA DEPOSITION;
CHEMICAL ANALYSIS;
CHEMICAL PROPERTIES;
FILMS;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GLASS;
HEAT TREATMENT;
PARTICLE SIZE;
PLASMA DEPOSITION;
SILICON COMPOUNDS;
SUBSTRATES;
SURFACE ROUGHNESS;
THERMODYNAMIC STABILITY;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 43249126997
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.03.003 Document Type: Article |
Times cited : (22)
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References (32)
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