SCOPUS 정보 검색 플랫폼

Volumn 163, Issue 164, 2003, Pages 323-330

Study of an atmospheric pressure glow discharge (APG) for thin film deposition

Author keywords

Aluminum; Helium; Hexamethyldisiloxane; PACVD; Radio frequency

Indexed keywords

ATMOSPHERIC PRESSURE; CURRENT DENSITY; EXHAUST GASES; GLOW DISCHARGES; INTERFEROMETRY; MASS SPECTROMETRY; SHEET METAL;

DIELECTRIC BARRIER DISCHARGES;

THIN FILMS;

ALUMINUM; CHEMICAL VAPOR DEPOSITION; FILM; HELIUM;

EID: 0037472671 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00487-5 Document Type: Article

Times cited : (96)

References (16)

1
- 0001939121
- U. Kogelschatz, B. Eliasson, W. Egli, J. Phys. IV France 7 (1997) C4-C47.
- (1997) J. Phys. IV France , vol.7 , pp. C4-C47
- Kogelschatz, U.¹ Eliasson, B.² Egli, W.³

2
- 0028499917
- M. Kogoma, S. Okazaki, J. Phys. D 27 (1994) 1985.
- (1994) J. Phys. D , vol.27 , pp. 1985
- Kogoma, M.¹ Okazaki, S.²

3
- 0032022902
- F. Massines, A. Rabehi, P. Decomps, R. Ben Gadri, P. Segur, Ch. Mayoux, J. Appl. Phys. 83 (1998) 2950.
- (1998) J. Appl. Phys. , vol.83 , pp. 2950
- Massines, F.¹ Rabehi, A.² Decomps, P.³ Ben Gadri, P.⁴ Segur, P.⁵ Mayoux, C.⁶

4
- 0032658306
- H. Grunwald, R. Adam, J. Bartella, et al., Surf. Coating Technol. 111 (1999) 287.
- (1999) Surf. Coating Technol. , vol.111 , pp. 287
- Grünwald, H.¹ Adam, R.² Bartella, J.³

5
- 84994453552
- Bundesdeutsche Fachtagung Plasmatechnologie, Greifswald, Germany, (in German)
- M. Roth, M. Neiger, Proceedings 10. Bundesdeutsche Fachtagung Plasmatechnologie, Greifswald, Germany, 2001, p. 78 (in German).
- (2001) Proceedings , vol.10 , pp. 78
- Roth, M.¹ Neiger, M.²

6
- 0012829029
- U. Ascoli-Bartoli, A. De Angelie, S. Martellucci, Nuovo Cimento 28 (1960) 4340.
- (1960) Nuovo Cimento , vol.28 , pp. 4340
- Ascoli-Bartoli, U.¹ De Angelie, A.² Martellucci, S.³

7
- 85077789218
- J.D. Trolinger, SPIE Proc. 2861 (1996) 114.
- (1996) SPIE Proc. , vol.2861 , pp. 114
- Trolinger, J.D.¹

8
- 84985838682
- German
- W. Möller, M. Schmidt, T. Ruger, Korrosion 15 (1984) 96, (in German).
- (1984) Korrosion , vol.15 , pp. 96
- Möller, W.¹ Schmidt, M.² Ruger, T.³

9
- 0003925511
- 4th ed, VDI-Verlag, Düsseldorf, (in German)
- H. Domininghaus, Die Kunststoffe und ihre Eigenschaften, 4th ed, VDI-Verlag, Dusseldorf, 1992, (in German).
- (1992) Die Kunststoffe Und Ihre Eigenschaften
- Domininghaus, H.¹

10
- 0031776868
- J. Schwarz, M. Schmidt, A. Ohl, Surf. Coating Technol. 98 (1998) 859.
- (1998) Surf. Coating Technol. , vol.98 , pp. 859
- Schwarz, J.¹ Schmidt, M.² Ohl, A.³

11
- 0012820625
- S. Müller, R.-J. Zahn, Contr. Plasma Phys. 36 (1996) 696.
- (1996) Contr. Plasma Phys. , vol.36 , pp. 696
- Müller, S.¹ Zahn, R.-J.²

12
- 0003839414
- Springer, Berlin
- Y.P. Raizer, Gas Discharge Physics, Springer, Berlin, 1991.
- (1991) Gas Discharge Physics
- Raizer, Y.P.¹

13
- 0003730831
- J. Wiley and Sons, Inc, New York
- M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, J. Wiley & Sons, Inc, New York, 1994.
- (1994) Principles of Plasma Discharges and Materials Processing
- Lieberman, M.A.¹ Lichtenberg, A.J.²

14
- 0001096840
- R. Basner, R. Foest, M. Schmidt, K. Becker, H. Deutsch, Int. J. Mass Spectrom. Ion Process. 176 (1998) 245.
- (1998) Int. J. Mass Spectrom. Ion Process , vol.176 , pp. 245
- Basner, R.¹ Foest, R.² Schmidt, M.³ Becker, K.⁴ Deutsch, H.⁵

15
- 84994439579
- L.G. Christophorou, D.R. James (Eds.), Kluwer Academicy Plenum Press, New York
- R. Foest, F. Sigeneger, M. Schmidt, in: L.G. Christophorou, D.R. James (Eds.), Gaseous Dielectrics IX, Kluwer Academicy Plenum Press, New York, 2001, p. 113.
- (2001) Gaseous Dielectrics , vol.9 , pp. 113
- Foest, R.¹ Sigeneger, F.² Schmidt, M.³

16
- 0012825188
- Ohm Co, (in Japanese)
- M. Hayashi, Handbook of Plasma Science, Ohm Co, 1992, (in Japanese).
- (1992) Handbook of Plasma Science
- Hayashi, M.¹

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