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Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 368-371

Micro-jet plasma CVD with HMDSO/O2

Author keywords

Micro fabrication; Micro jet; Plasma CVD; SiOx

Indexed keywords

COMPOSITION; FLUID DYNAMICS; MIXTURES; MONOMERS; ORGANIC COATINGS; OXIDATION; PLASMA JETS; PRESSURE EFFECTS; SILICA;

DEPOSITION RATE; HEXAMETHYLDISILOXANE; MICRO-FABRICATION; MICRO-JET PLASMA; POWER DENSITY;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

COATING;

EID: 24644461067 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.083 Document Type: Article

Times cited : (10)

References (13)

1
- 0031346359
- M.R. Alexander F.R. Jones R.D. Short Plasmas Polym. 2/4 1997 277
- (1997) Plasmas Polym. , vol.2-4 , pp. 277
- Alexander, M.R.¹ Jones, F.R.² Short, R.D.³

2
- 0033353441
- N. Benissad C. Boisse-laporte C. Vallée A. Granier A. Goullet Surf. Coat. Technol. 116-119 1999 868
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 868
- Benissad, N.¹ Boisse-laporte, C.² Vallée, C.³ Granier, A.⁴ Goullet, A.⁵

3
- 79956028728
- T. Ito T. Izaki K. Terashima Appl. Phys. Lett. 80/15 2002 2648
- (2002) Appl. Phys. Lett. , vol.80 , Issue.15 , pp. 2648
- Ito, T.¹ Izaki, T.² Terashima, K.³

4
- 0001500804
- L. Bardos V. Dusek L. Vanecek J. Non-Cryst. Solids 97-98 1987 281
- (1987) J. Non-Cryst. Solids , vol.97-98 , pp. 281
- Bardos, L.¹ Dusek, V.² Vanecek, L.³

5
- 0023996526
- L. Bardos V. Dusek Thin Solid Films 158 1988 265
- (1988) Thin Solid Films , vol.158 , pp. 265
- Bardos, L.¹ Dusek, V.²

6
- 0033259662
- J. Voigt B. Reinker I.W. Rangelow G. Mariotto I. Shvets P. Guethner H. Löschner J. Vac. Sci. Technol. B 17 6 1999 2764
- (1999) J. Vac. Sci. Technol. B , vol.17 , Issue.6 , pp. 2764
- Voigt, J.¹ Reinker, B.² Rangelow, I.W.³ Mariotto, G.⁴ Shvets, I.⁵ Guethner, P.⁶ Löschner, H.⁷

7
- 0034318194
- J. Voigt F. Shi P. Hudek I.W. Rangelow J. Vac. Sci. Technol. B 18 6 2000 3525
- (2000) J. Vac. Sci. Technol. B , vol.18 , Issue.6 , pp. 3525
- Voigt, J.¹ Shi, F.² Hudek, P.³ Rangelow, I.W.⁴

8
- 18144445229
- A. Holländer L. Abhinandan Surf. Coat. Technol. 174-175 2003 1175
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 1175
- Holländer, A.¹ Abhinandan, L.²

9
- 2342586702
- L. Abhinandan A. Holländer Thin Solid Films 457 2004 241
- (2004) Thin Solid Films , vol.457 , pp. 241
- Abhinandan, L.¹ Holländer, A.²

10
- 0038498840
- A.K. Chu J.Y. Lin M.L. Wang C.C. Fan H.S. Shue T.H. Chuang S.Y. Chen C.H. Chiu S.F. Lin J. Electron. Mater. 32/6 2003 492
- (2003) J. Electron. Mater. , vol.32 , Issue.6 , pp. 492
- Chu, A.K.¹ Lin, J.Y.² Wang, M.L.³ Fan, C.C.⁴ Shue, H.S.⁵ Chuang, T.H.⁶ Chen, S.Y.⁷ Chiu, C.H.⁸ Lin, S.F.⁹

11
- 1442288480
- C.A. Barrios V.R. Almeida R.R. Panepucci B.S. Schmidt M. Lipson IEEE Photonics Technol. Lett. 16/2 2004 506
- (2004) IEEE Photonics Technol. Lett. , vol.16 , Issue.2 , pp. 506
- Barrios, C.A.¹ Almeida, V.R.² Panepucci, R.R.³ Schmidt, B.S.⁴ Lipson, M.⁵

12
- 0037373526
- L. Dal Negro M. Cazzanelli N. Daldosso Z. Gaburro L. Pavesi F. Priolo D. Pacifici G. Franzó F. Icano Physica, E, Low-dimens. Syst. Nanostruct. 16 2003 297
- (2003) Physica, E, Low-dimens. Syst. Nanostruct. , vol.16 , pp. 297
- Dal Negro, L.¹ Cazzanelli, M.² Daldosso, N.³ Gaburro, Z.⁴ Pavesi, L.⁵ Priolo, F.⁶ Pacifici, D.⁷ Franzó, G.⁸ Icano, F.⁹

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