Aerosol-assisted plasma deposition of barrier coatings using organic-inorganic sol-gel precursor systems

Chemical Vapor Deposition

Volumn 11, Issue 11-12, 2005, Pages 491-496

  Vangeneugden, Dirk ^a   Paulussen, Sabine ^a   Goossens, Olivier ^a   Rego, Robby ^a   Rose, Klaus ^b  

^a FLEMISH INSTITUTE FOR TECHNOLOGICAL RESEARCH VITO   (Belgium)

^b FRAUNHOFER INSTITUTE FOR SILICATE RESEARCH ISC   (Germany)

Author keywords

Aerosol deposition; Barrier coating; DBD plasma; Hybrid materials; Sol gels

Indexed keywords

AEROSOLS; DEPOSITION; DIELECTRIC MATERIALS; ELECTRIC DISCHARGES; HYDROLYSIS; PLASMAS; RAMAN SPECTROSCOPY; SILANES; SOL-GELS;

AEROSOL DEPOSITION; BARRIER COATINGS; DBD PLASMA; HYBRID MATERIALS;

COATINGS;

EID: 29844452291     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200406345     Document Type: Article

References (20)

1. C. A. Harper, E. M. Petrie, Plastics Materials and Processes: A Concise Encyclopedia, Wiley-VCH Verlag, Berlin 2003.
2. Y. Leterrier, Prog. Mater. Sci. 2003, 48, 1.
3. J. D. Affinito, Surf Coating Technol. 2000, 133-134, 528.
4. M. Schaepkens, T. Won Kim, A. Gün Erlat, M. Yan, K. W. Flanagan, C. M. Heller, P. A. McConnelee, J. Vac. Sci. Technol., A 2004, 22, 1716.
5. J. R. Roth, Industrial Plasma Engineering Volume 2 Applications to Nonthermal Plasma Processing, IOP Publishing, Philadelphia, PA 2001.
6. A. Villermet, P. Cocolios, G. Rames-Langlade, F. Coeuret, J. L. Gelot, E. Prinz, F. Forster, Surf. Coating Technol. 2003, 174-175, 899.
7. U. Kogelschatz, G. Eliasson, W. Egli, Pure Appl. Chem. 1999, 71, 1819.
8. R. Ben Gadri, J. R. Roth, T. C. Montie, K. Kelly-Wintenberg, P. P. Y. Tsai, D. J. Helfritch, P. Feldman, D. M. Sherman, F. Karakaya, Z. Y. Chen, Surf. Coating Technol. 2000, 131, 528.
9. M. Moisan, J. Barbeau, M.-C. Crevier, J. Pelletier, N. Philip, B. Saoudi, Pure Appl. Chem. 2002, 74, 349.
10. O. Goossens, E. Dekempeneer, D. Vangeneugden, R. Van de Leest, C. Leys, Surf Coating Technol. 1999, 142, 474.
11. M. Aouinti, P. Bertrand, F. Poncin-Epaillard, Plasma Polym. 2003, 8, 225.
12. C. Sun, D. Zhang, L. C. Wadsworth, Adv. Polym. Technol. 1999, 18, 171.
13. L. J. Ward, W. C. E. Schofield, J. P. S. Badyal, A. J. Goodwin, P. J. Merlin, Chem. Mater. 2003, 15, 1466.
14. S. Martin, F. Massines, N. Gherardi, C. Jimenez, Surf. Coating Technol. 2004, 177-178, 693.
15. C. Klages, M. Eichler, R. Thyen, New Diamond Front. Carbon Technol. 2003, 13, 175.
16. R. Foest, F. Adler, F. Sigegener, M. Schmidt, Surf. Coating Technol. 2003, 163-164, 323.
17. A. Sonnenfeld, T. M. Tun, L. Zajícková, K. V. Kozlov, H.-E. Wagner, J. F. Behnke, R. Hippler, Plasmas Polym. 2001, 6, 237.
18. O. Goossens, S. Paulussen, D. Vangeneugden, H. Vrielinck, F. Callens, C. Leys, J. Meneve New Diamond Front, Carbon Technol. 2003, 13, 221.
19. K.-H. Haas, S. Amberg-Schwab, K. Rose, G. Schottner, Surf. Coating Technol. 1999, 111, 72.
20. K.-H. Haas, S. Amberg-Schwab, K. Rose, Thin Solid Films 1999, 351, 198.