Deposition of hydrocarbon films by means of helium-ethylene fed glow dielectric barrier discharges

Plasma Processes and Polymers

Volumn 2, Issue 9, 2005, Pages 688-694

  Fanelli, Fiorenza ^a   Fracassi, Francesco ^a   d'Agostino, Riccardo ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

Atmospheric pressure glow discharges (APGD); Ethylene; Glow dielectric barrier discharges (GDBD); Plasma enhanced chemical vapor deposition (PECVD)

Indexed keywords

ATMOSPHERIC PRESSURE; COMPOSITION; ELECTRIC VARIABLES MEASUREMENT; ETHYLENE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GAS CHROMATOGRAPHY; GLOW DISCHARGES; HELIUM; MASS SPECTROMETRY;

ATMOSPHERIC PRESSURE GLOW DISCHARGES (APGD); GLOW DIELECTRIC BARRIER DISCHARGES (GDBD); OPTICAL EMISSION SPECTROSCOPY;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 29244473876     PISSN: 16128850     EISSN: None     Source Type: Journal    
DOI: 10.1002/ppap.200500057     Document Type: Article

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