Low-cost fabrication technologies for nanostructures: State-of-the-art and potential

Nanotechnology

Volumn 26, Issue 4, 2015, Pages

  Santos, A ^a   Deen, M J ^b   Marsal, L F ^c  

^a UNIVERSITY OF ADELAIDE   (Australia)

^b MCMASTER UNIVERSITY   (Canada)

^c UNIVERSITAT ROVIRA I VIRGILI   (Spain)

Author keywords

Large area production; Lithography; Nanofabrication

Indexed keywords

COSTS; LITHOGRAPHY; NANOELECTRONICS; NANOSTRUCTURES; PHOTOLITHOGRAPHY;

HIGH THROUGHPUT; LARGE SCALE PRODUCTIONS; LOW COST FABRICATION; LOW COSTS; NANOFABRICATION PROCESS; STATE OF THE ART;

NANOTECHNOLOGY;

EID: 84920861041     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/26/4/042001     Document Type: Review

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