Multiparametric porous silicon gas sensors with improved quality and sensitivity

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 2, 2003, Pages 523-527

  Oton, C J ^a   Pancheri, L ^a   Gaburro, Z ^a   Pavesi, L ^a   Baratto, C ^b   Faglia, G ^b   Sberveglieri, G ^b  

^a UNIVERSITY OF TRENTO   (Italy)

^b UNIVERSITY OF BRESCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ELECTRIC CONDUCTIVITY OF SOLIDS; NITROGEN OXIDES; POLLUTION DETECTION; SENSITIVITY ANALYSIS; SUBSTRATES;

CAVITY RESONANCE WAVELENGTH; POROUS SILICON GAS SENSORS; RESONANCE WAVELENGTH;

POROUS SILICON;

EID: 0037595480     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306557     Document Type: Conference Paper

References (7)

1. M. J. Sailor, in Properties of Porous Silicon, edited by L.T Canham (IEE Inspec, London U.K., 1997) p. 364.
2. Z. Gaburro, G. Faglia, C. Barrato, G. Sberveglieri, and L. Pavesi, Mat. Res. Soc. Symp. Proc., 638, F11.6.1 (2001).
3. V. Mulloni, and L. Pavesi, Appl. Phys. Lett. 76, 2523 (2000).
4. L. Boarino, C. Baratto, F. Geobaldo, G. Amato, E. Comini, A. M. Rossi, G. Faglia, G. Leronddel, and G. Sberveglieri, Mat. Sc. and Eng. B 69-70, 210 (2000).
5. C. Baratto, G. Faglia, G. Sberveglieri, L. Boarino, A. M. Rossi, and G. Amato, Thin Solid Films 391, 261 (2001).
6. L. Pavesi, Riv. Nuovo Cim. 20, 1 (1997).
7. Z. Gaburro, N. Daldosso, L. Pavesi, G. Faglia, C. Barratto, and G. Sberveglieri, Appl. Phys. Lett. 78, 3744 (2001).