Porous silicon multilayers for sensing by tuneable IR-transmission filtering

Sensors and Actuators, B: Chemical

Volumn 100, Issue 1-2, 2004, Pages 163-167

  Volk, J ^a   Balazs J ^a   Toth A L ^a   Barsony I ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Coupled Fabry Perot; Microcavity; Nano fluidics; Porous silicon multilayer

Indexed keywords

CURRENT DENSITY; ELECTROLYTES; ELLIPSOMETRY; ETCHING; FLUIDICS; INFRARED TRANSMISSION; INTERFACES (MATERIALS); LIGHT REFLECTION; MULTILAYERS; POROSITY; REFRACTIVE INDEX; RESONANCE; SIGNAL FILTERING AND PREDICTION; SPECTROSCOPY;

COUPLED FABRY-PEROT; MICROCAVITIES; NANO-FLUIDICS; POROUS SILICON MULTILAYERS;

POROUS SILICON;

EID: 2342450554     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.12.042     Document Type: Article

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