Nanolithography with neutral chromium and helium atoms

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2905-2911

  Brezger, B ^a   Schulze, Th ^a   Drodofsky, U ^a   Stuhler, J ^a   Nowak, S ^a   Pfau, T ^a   Mlynek, J ^a  

^a UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001270199     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589393     Document Type: Article

References (23)

1. G. Timp, R. E. Behringer, D. M. Tennant, J. E. Cunningham, M. Prentiss, and K. K. Berggren, Phys. Rev. Lett. 69, 1636 (1992).
2. J. J. McClelland, R. E. Scholten, E. C. Palm, and R. J. Celotta, Science 262, 877 (1993).
3. R. W. McGowan, D. M. Giltner, and S. A. Lee, Opt. Lett. 20, 2535 (1995).
4. U. Drodofsky, J. Stuhler, B. Brezger, Th. Schulze, M. Drewsen, T. Pfau, and J. Mlynek, Microelectron. Eng. 35, 285 (1997).
5. K. K. Berggren, A. Bard, J. L. Wilbur, J. D. Gillaspy, A. G. Helg, J. J. McClelland, S. L. Rolston, W. D. Phillips, M. Prentiss, and G. M. Whitesides, Science 269, 1255 (1995).
6. S. Nowak, T. Pfau, and J. Mlynek, Appl. Phys. B: Lasers Opt. 63, 3 (1996).
7. M. Kreis, F. Lison, D. Haubrich, D. Meschede, S. Nowak, T. Pfau, and J. Mlynek, Appl. Phys. B: Lasers Opt. 63, 649 (1996).
8. C. S. Adams, M. Sigel, and J. Mlynek, Phys. Rep. 240, 143 (1994).
9. J. Dalibard and C. Cohen-Tannoudji, J. Opt. Soc. Am. B 2, 1707 (1985).
10. H. Metcalf and P. van der Strafen, Phys. Rep. 244, 203 (1994).
11. T. Sleator, T. Pfau, V. I. Balykin, and J. Mlynek, Appl. Phys. B: Lasers Opt. 54, 375 (1992).
12. M. Drewsen, U. Drodofsky, Ch. Weber, G. Schreiber, and J. Mlynek, J. Phys. B 29, L843 (1996).
13. U. Drodofsky, J. Stuhler, Th. Schulze, M. Drewsen, B. Brezger, T. Pfau, and J. Mlynek, Appl. Phys. B: Lasers Opt. (in press).
14. P. E. Laibinis, G. M. Whitesides, D. L. Tao, A. N. Parikh, and R. G. Nuzzo, J. Am. Chem. Soc. 113, 7152 (1991).
15. Prof. Dr. M. Grunze and Dr. C. David (private communications).
16. H. Ozaki and Y. Harada, J. Am. Chem. Soc. 112, 5735 (1990).
17. M. P. Seah and W. A. Dench, Surf. Interface Anal. 1, 2 (1979).
18. Y. Xia, X. Zhao, E. Kim, and G. M. Whitesides, Chem. Mater. 7, 2332 (1995).
19. N. Camillone III, C. E. D. Chidsey, G. Liu, and G. Scoles, J. Chem. Phys. 98, 3503 (1993).
20. Ch. Kurtsiefer and J. Mlynek, Appl. Phys. B: Lasers Opt. 64, 85 (1997).
21. See, e.g., Ch. Kurtsiefer, T. Pfau, and J. Mlynek, Nature (London) 386, 150 (1997).
22. S. Nowak, Ch. Kurtsiefer, C. David, and T. Pfau, Opt. Lett. (in press).
23. M. R. Andrews, C. G. Townsend, H.-J. Miesner, D. S. Durfee, D. M. Kurn, and W. Ketterle, Science 275, 637 (1997).