Fabrication of nanostripe surface structure by multilayer film deposition combined with micropatterning

Nanotechnology

Volumn 21, Issue 9, 2010, Pages

  Ando, Y ^a   Miyake, K ^a   Mizuno, A ^a   Korenaga, A ^a   Nakano, M ^a   Mano, H ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FABRICATION; MULTILAYER FILMS; NANOSTRUCTURES; POLISHING;

BOTTOM-UP PROCESS; LONG RANGE ORDERS; MATERIAL SELECTION; MECHANICAL POLISHING; MULTI-LAYERED FILMS; MULTILAYER FILM DEPOSITION; SILICON SUBSTRATES; TOP-DOWN FABRICATION;

MULTILAYERS;

EID: 78049348631     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/9/095304     Document Type: Article

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