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Volumn 80, Issue 21, 2002, Pages 4051-4053

Nanolithography based on patterned metal transfer and its application to organic electronic devices

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL LENGTH; CONTACT ELECTRODES; ELECTRONIC DEVICE; ETCH MASK; LATERAL DIMENSION; METAL FILM; METAL TRANSFERS; ORGANIC ELECTRONIC DEVICES; ORGANIC SOLAR CELL; ORGANIC THIN FILM TRANSISTORS; PATTERN RESOLUTION; PATTERNING METHODS; PENTACENES; POLYMER GRATINGS; SUBMICRON SCALE;

EID: 79956005815     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1481980     Document Type: Article
Times cited : (127)

References (19)
  • 12
    • 0040371215 scopus 로고
    • 9th ed. (American Society for Metals, Metals Park, OH)
    • J. L. Jellison and F. J. Zanner, Metals Handbook, 9th ed. (American Society for Metals, Metals Park, OH, 1983), Vol. 6, p. 672.
    • (1983) Metals Handbook , vol.6 , pp. 672
    • Jellison, J.L.1    Zanner, F.J.2
  • 15
    • 79957968965 scopus 로고    scopus 로고
    • Sumitomo Chemical America, Inc., Santa Clara, CA) was used for a polymer film
    • Photoresist (PFI-88A2, Sumitomo Chemical America, Inc., Santa Clara, CA) was used for a polymer film.
    • Photoresist (PFI-88A2)
  • 16
    • 79957943662 scopus 로고    scopus 로고
    • note
    • Ar sputter etch and other RIE processes in this work were carried out in a parallel-plate (diameter: ∼24 cm) RIE system (PlasmaTherm 790 series).
  • 17
    • 0001502727 scopus 로고    scopus 로고
    • 2/Si) was then soaked in the solution for 90 min. To remove excess OTS, the soak was followed by the sonication in chloroform for 30 min, after which it was baked for 1 h at 150°C in air. The metal strike layer consisted of a 30-nm-thick Au film deposited onto the pentacene surface. jaJAPIAU 0021-8979
    • 2/Si) was then soaked in the solution for 90 min. To remove excess OTS, the soak was followed by the sonication in chloroform for 30 min, after which it was baked for 1 h at 150°C in air. The metal strike layer consisted of a 30-nm-thick Au film deposited onto the pentacene surface. jap JAPIAU 0021-8979
    • (2001) J. Appl. Phys. , vol.89 , pp. 1470
    • Shtein, M.1    Gossenberger, H.F.2    Benziger, J.B.3    Forrest, S.R.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.