E-beam lithography for micro-/nanofabrication

Biomicrofluidics

Volumn 4, Issue 2, 2010, Pages

  Altissimo, Matteo ^a  

^a MELBOURNE CENTRE FOR NANOFABRICATION   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

NANOTECHNOLOGY;

E-BEAM LITHOGRAPHY; MICRO AND NANOSTRUCTURES; NANOFABRICATION TECHNIQUES;

ELECTRON BEAM LITHOGRAPHY;

EID: 77954478731     PISSN: 19321058     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3437589     Document Type: Article

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