Pushing the limits of lithography

Nature

Volumn 406, Issue 6799, 2000, Pages 1027-1031

  Ito, Takashi ^a   Okazaki, Shinji ^b  

^a FUJITSU LABORATORIES LTD   (Japan)

^b ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE; ELECTRON BEAM; ELECTRONICS; MICROELECTRODE; MICROPROCESSOR; OPTICAL DENSITY; PRIORITY JOURNAL; REVIEW; SEMICONDUCTOR; TECHNIQUE;

EID: 0034738987     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/35023233     Document Type: Review

References (15)

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