Achieving 1/20 resolution by one-color initiation and deactivation of polymerization

Science

Volumn 324, Issue 5929, 2009, Pages 910-913

  Li, Njie ^a   Gattass, Rafael R ^a   Gershgoren, Erez ^a   Hwang, Hana ^a   Fourkas, John T ^a,b,c  

^a University of Maryland   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; FUNDAMENTAL PARTICLE; POLYMER; POLYMERIZATION; WAVELENGTH;

ABSORPTION; ARTICLE; CROSS LINKING; IMAGE DISPLAY; LIGHT ABSORPTION; MULTIPHOTON MICROSCOPY; NANOFABRICATION; OPTICAL RESOLUTION; POLYMERIZATION; PRIORITY JOURNAL; SPECTRAL SENSITIVITY; THREE DIMENSIONAL IMAGING; CHEMISTRY; COLOR; METHODOLOGY; NANOTECHNOLOGY; OPTICS; PHOTOCHEMISTRY; PHOTON;

POLYMER;

COLOR; NANOTECHNOLOGY; OPTICS AND PHOTONICS; PHOTOCHEMICAL PROCESSES; PHOTONS; POLYMERS;

EID: 66149129610     PISSN: 00368075     EISSN: 10959203     Source Type: Journal    
DOI: 10.1126/science.1168996     Document Type: Article

References (27)

1. S. E. Thompson, S. Parthasarathy, Mater. Today 9,20 (2006).
2. H. Ito, in Microlithography: Molecular Imprinting (Springer-Verlag, Berlin, 2005), vol. 172, Advances in Polymer Science, pp. 37-245.
3. S. Kawata, H. B. Sun, T. Tanaka, K. Takada, Nature 412, 697 (2001).
4. M. Rumi, S. Barlow, J. Wang, J. W. Perry, S. R. Marder, in Photoresponsive Polymers I (Springer-Verlag, Berlin, 2008), vol. 213, Advances in Polymer Science, pp. 1-95.
5. C. N. LaFratta, J. T. Fourkas, T. Baldacchini, R. A. Farrer, Angew. Chem. Int. Ed. 46, 6238 (2007).
6. D. Yang, S. J. Jhaveri, C. K. Ober, Mater. Res. Sci. Bull. 30, 976 (2005).
7. J.-F. Xing et al., Appl. Phys. Lett. 90, 131106 (2007).
8. D. Tan et al., Appl. Phys. Lett. 90, 071106 (2007).
9. W. Haske et al., Opt. Express 15, 3426 (2007).
10. H.-B. Sun, T. Tanaka, S. Kawata, Appl. Phys. Lett. 80, 3673 (2002).
11. T. A. Klar, S. Jakobs, M. Dyba, A. Egner, S. W. Hell, Proc. Natl. Acad. Sci. U.S.A. 97, 8206 (2000).
12. S. W. Hell, Science 316, 1153 (2007).
13. S. W. Hell, Nat. Methods 6, 24 (2009).
14. C. S. Colley et al., J. Am. Chem. Soc. 124, 14952 (2002).
15. J. O. Hirschfelder, C. F. Curtiss, R. B. Bird, Molecular Theory of Gases and Liquids (Wiley, New York, 1954).
16. Materials and methods are available as supporting material on Science Online.
17. The maximum delay time of 13 ns is determined by the 76 MHz laser repetition rate.
18. Because MAIL from gold nanoparticles is a three-photon process at 800 nm, the images show the cubes of the PSFs.
19. R. A. Farrer, F. L. Butterfield, V. W. Chen, J. T. Fourkas, Nano Lett. 5, 1139 (2005).
20. The deactivation laser was operated in fs pulsed mode for the purpose of measuring its PSF using MAIL but was operated in CW mode for all other experiments. The beam profile and direction did not change measurably in going from pulsed to CW mode, so we expect the PSF to be nearly identical in both modes.
21. All powers were as measured at the sample position.
22. The slight asymmetry of the voxel is due to our use of linearly polarized light for fabrication. See (26).
23. AFM cannot measure reentrant (overhanging) features, so although the voxels appear to be tapered in these images, they are not.
24. M. W. Beijersbergen, R. P. C. Coerwinkel, M. Kristensen, J. P. Woerdman, Opt. Commun. 112, 321 (1994).
25. B. Harke, C. K. Ullal, J. Keller, S. W. Hell, Nano Lett. 8, 1309 (2008).
26. H. B. Sun et al., Appl. Phys. Lett. 83, 819 (2003).
27. We appreciate the support of the Maryland NanoCenter and its Nanoscale Imaging, Spectroscopy, and Properties Laboratory (NISPLab). NISPLab is supported in part by NSF as a Materials Research Science and Engineering Center (MRSEC) Shared Experimental Facility. This work was supported in part by the UMD-NSF-MRSEC under grant DMR 05-20471. We are grateful to E. Williams for the use of her AFM and to J. Goldhar, Y. Leng, and V. Yun for fabricating the phase mask used in this work. The University of Maryland has filed a provision patent based on the work presented in this paper.