Independent parallel lithography using the atomic force microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2456-2461

  Minne, S C ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039815370     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)

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