Dendrimer monolayers as negative and positive tone resists for scanning probe lithography

Nano Letters

Volumn 4, Issue 5, 2004, Pages 889-893

  Rolandi, Marco ^a   Suez, Itai ^b,c   Dai, Hongjie ^a   Fréchet, Jean M J ^b,c  

^a STANFORD UNIVERSITY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENDRIMER; TITANIUM; TITANIUM DIOXIDE;

ARTICLE; DENSITY; ELECTRIC FIELD; MOLECULAR INTERACTION; MOLECULE; PROCESS DEVELOPMENT; SCANNING PROBE MICROSCOPY; SOLUBILITY; SURFACE PROPERTY;

EID: 2642542283     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl049700i     Document Type: Article

References (30)

1. Quate, C. F. Surf. Sci. 1997, 386, 259.
2. Minne, S.; Adams, J.; Yaralioglu, G.; Manalis, S.; Atalar, A.; Quate, C. Appl. Phys. Lett. 1998, 73, 1742.
3. Cooper, E. B.; Manalis, S. R.; Fang, H.; Dai, H.; Matsumoto, K.; Minne, S. C.; Hunt, T.; Quate, C. F. Appl. Phys. Lett. 1999, 29, 3566.
4. Dai, H.; Franklin, N.; Han, J. Appl. Phys. Lett. 1998, 73, 1508.
5. Dagata, J. A.; Schneir, J.; Harary, H. H.; Evans, C. J.; Postek, M. T.; Bennett, J. Appl. Phys. Lett. 1990, 56, 2001.
6. Snow, E.; Campbell, P. Appl. Phys. Lett. 1994, 64, 1932.
7. Matsumoto, K.; Ishii, M.; Segawa, K.; Oka, Y.; Vartanian, B. J.; Harris, J. S. Appl. Phys. Lett. 1996, 68, 34.
8. Dubois, E.; Bubendorff, J. L. J. Appl. Phys. 2000, 87, 8148.
9. Servat, J.; Gorostiza, P.; Sanz, F.; Perez-Murano, F.; Barniol, N.; Abadal, G.; Aymerich, X. J. Vac. Sci. Technol. A 1997, 14(3), 1208.
10. Wilder, K.; Quate, C. F.; Adderton, D.; Bernstein, R.; Elings, V. Appl. Phys. Lett. 1998, 73, 2527.
11. (a) Tully, D. C.; Wilder, K.; Fréchet, J. M.; Trimble, A.; Quate, C. F. Adv. Mater. 1999, 11, 314.
12. (b) Tully, D. C.; Fréchet, J. M. J. Chem. Commun. 2001, 1229.
13. Lercel, M.; Redinbo, G.; Craighead, H. G.; Sheen, C. W.; Allara, D. L. Appl. Phys. Lett. 1994, 65, 974.
14. Liu, G. Y.; Qian, Y. L. Acc. Chem. Res. 2000, 33, 457.
15. Sugimura, H.; Uchida, T.; Kitamura, N.; Masuhara, H. J. Vac. Sci. Technol. B 1994, 12, 2884.
16. Hu, S.; Hamidi, A.; Altmeyer, S.; Koster, T.; Spangenberg, B.; Kurz, H. J. Vac. Sci. Technol. B 1998, 16, 2822.
17. Piner, R.; Zhu, J.; Xu, F.; Hong, S.; Mirkin, C. A. Science 1999, 283, 661.
18. Li, Y.; Maynor, B.; Liu, J. J. Am. Chem. Soc. 2001, 123, 2105.
19. Hoeppener, S.; Maoz, R.; Sagiv, J. Nano Lett. 2003, 3, 761.
20. Cavallini, M.; Mei, P.; Biscarini, F. Appl. Phys. Lett. 2003, 83, 5286.
21. Rolandi, M.; Quate, C. F.; Dai, H. Adv. Mater. 2002, 14, 191.
22. Held, R.; Heinzel, T.; Studerus, P.; Ensslin, K.; Holland, M. Appl. Phys. Lett. 1997, 71, 2689.
23. Tour, J. M.; Reinerth, W. A.; Jones, L., II; Burgin, T. P.; Zhou, C.; Muller, C. J.; Deshpande, M. R.; Reed, M. A. Ann. N. Y. Acad. Sci. 1998 852, 197-204.
24. O'Regan, B.; Grätzel, M. Nature 1991 353, 737-740.
25. Sugimura, H.; Nakagiri, N. J. Vac. Sci. Technol. A 1996 14(3), 1223-1227.
26. (a) Hawker, C. J.; Fréchet, J. M. J. J. Am. Chem. Soc. 1990, 112, 7638.
27. (b) Grayson, S. M.; Fréchet, J. M. J. Chem. Rev. 2001, 101, 3819.
28. Tully, D. C.; Trimble, A. R.; Fréchet, J. M. J.; Wilder, K.; Quate, C. F. Chem. Mater. 1999, 11, 2892-2898.
29. Djenizian, T.; Santinacci, L.; Hildebrand, H.; Schmuki, P. Surf. Sci. 2003, 524, 40-48.
30. Neumann, A. W.; Good, R. J. Surface and Colloid Science Vol. II: Experimental Methods; Plenum Press: New York, 1979.