8.09 - MEMS Structures for On-chip Testing of Mechanical and Surface Properties of Thin Films

Comprehensive Structural Integrity

Volumn 8, Issue , 2007, Pages 325-356

  Ballarini, R ^a   Kahn, H ^a   Heuer, A H ^a   De Boer, M P ^b   Dugger, M T ^b  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS-STRUCTURE; ON CHIPS;

SURFACE TESTING;

EID: 84903418979     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B0-08-043749-4/08126-X     Document Type: Chapter

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