Subcritical crack growth in silicon MEMS

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 319-327

  Van Arsdell, William W ^a   Brown, Stuart B ^a  

^a EXPONENT INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; FATIGUE OF MATERIALS; SILICON;

POLYSILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0032594988     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788636     Document Type: Article

References (11)

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3. T. Chen and W. Knapp, "The fracture of single-crystal silicon under several liquid environments," J. Amer. Ceram. Soc., pp. 225-226, Mar./Apr. 1980.
4. S. W. Freiman, "Stress corrosion cracking of glasses and ceramics," in Stress Corrosion Cracking, R. H. Jones, Ed. Metals Park, OH: ASM, 1992, pp. 337-344.
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9. M. F. Kanninen and C. H. Popelar, Advanced Fracture Mechanics. New York: Oxford Univ. Press, 1985, pp. 505-509.
10. W. W. Van Arsdell, "Subcritical crack growth in polysilicon MEMS," Ph.D. dissertation, Mechanical Engineering, M.I.T., Cambridge, MA, 1997.
11. E. A. Jackson, Perspectives of Nonlinear Dynamics. Cambridge: Cam/ bridge University Press, 1983.