Interferometric measurement for improved understanding of boundary effects in micromachined beams

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3875, Issue , 1999, Pages 61-72

  Jensen, Brian D ^a   Bitsie, Fernando ^a   de Boer, Maarten ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; ELASTIC MODULI; FINITE ELEMENT METHOD; INTERFEROMETRY; MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESIDUAL STRESSES; SURFACE TREATMENT;

BOUNDARY EFFECTS; FIXED-FIXED BEAMS; MATERIAL PROPERTIES; STEP-UP ANCHOR; SURFACE MICROMACHINING;

BEAMS AND GIRDERS;

EID: 0033338028     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)