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Volumn 81, Issue 8, 1997, Pages 3474-3483

Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces

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Indexed keywords


EID: 0001599232     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365045     Document Type: Article
Times cited : (91)

References (46)
  • 3
    • 0028328259 scopus 로고    scopus 로고
    • K. Kendall, 263, 1720 (1994)
    • K. Kendall, 263, 1720 (1994).
  • 11
    • 85033185674 scopus 로고    scopus 로고
    • note
    • In the magnetic recording media industry stiction refers to a system in which friction, due to the presence of strong adhesion, is found to not be proportional to the applied load (Ref. 4). Because applied loads are relatively small compared to adhesive forces at the dimensions of micromechanical devices, the micromachining community has broadened the definition of stiction to refer to virtually all cases of high adhesion between contacting surfaces.
  • 27
    • 85033162814 scopus 로고    scopus 로고
    • note
    • A pure-methanol rinse could not be used directly after the ammonium fluoride etching step because the ammonium fluoride salt has a low solubility in methanol, and directly mixing the pure 40% ammonium fluoride solution used for etching with pure methanol produced white precipitates that coated the microstructures being released.
  • 30
    • 0014800514 scopus 로고
    • W. Kern ad D. A. Puotinen, RCA Rev. 30, 187 (1970); W. Kern, J. Electrochem. Soc. 137, 1887 (1990).
    • (1970) RCA Rev. , vol.30 , pp. 187
    • Kern, W.1    Puotinen, D.A.2
  • 31
    • 0025445393 scopus 로고
    • W. Kern ad D. A. Puotinen, RCA Rev. 30, 187 (1970); W. Kern, J. Electrochem. Soc. 137, 1887 (1990).
    • (1990) J. Electrochem. Soc. , vol.137 , pp. 1887
    • Kern, W.1
  • 32
    • 85033172235 scopus 로고    scopus 로고
    • note
    • Unfortunately, the effect of high humidity could not tested on the hydrophobic surfaces due their rapid oxidation in water and air (see Ref. 21).
  • 40
    • 85033183436 scopus 로고    scopus 로고
    • note
    • When microstructure surfaces are dried from water, a phenomenon called solid bridging has been shown to act between contacting surfaces (Ref. 8). The solid bridging is sufficiently strong to adhere all surfaces which come into contact, which in this case would be those surfaces pulled into contact by the surface tension of water.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.