Accurate method for determining adhesion of cantilever beams

Journal of Applied Physics

Volumn 86, Issue 2, 1999, Pages 817-827

  De Boer, M P ^a   Michalske, T A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CRACK PROPAGATION; DEFORMATION; ELASTICITY; FRACTURE MECHANICS; INTERFEROMETRY; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; SILICON WAFERS; STRAIN;

ADHESION MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0032614006     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370809     Document Type: Article

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