A millinewton microloading device

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 65-75

  Saif, M T A ^a   MacDonald, N C ^a  

^a Cornell University   (United States)

Author keywords

Buckling; Capacitors; Capillarity; Devices; Finite element; Load; Microelectromechanical instruments; Stability; Stress

Indexed keywords

ACTUATORS; BUCKLING; CAPACITORS; ETCHING; FINITE ELEMENT METHOD; FORCE CONTROL; METALLIZING; MINIATURE INSTRUMENTS; NATURAL FREQUENCIES; SINGLE CRYSTALS; STRESS ANALYSIS; THIN FILM DEVICES;

MILLINEWTON MICROLOADING DEVICE; SINGLE CRYSTAL REACTIVE ETCHING AND METALLIZATION (SCREAM);

MICROELECTROMECHANICAL DEVICES;

EID: 0030100388     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80127-0     Document Type: Article

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