Adhesion hysteresis of silane coated microcantilevers

Acta Materialia

Volumn 48, Issue 18-19, 2000, Pages 4531-4541

  De Boer, M P ^a   Knapp, J A ^a   Michalske, T A ^a   Srinivasan, U ^b   Maboudian, R ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; COATINGS; ELECTROSTATICS; HYSTERESIS; INTERFACIAL ENERGY; SILANES; THIN FILMS;

ADHESION HYSTERESIS; MICROCANTILEVERS;

INTERFACES (MATERIALS);

EID: 0034502893     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(00)00239-1     Document Type: Article

References (39)

1. Kamins T.I. Polycrystalline Silicon for Integrated Circuit Applications. 1988;Kluwer, Boston, MA.
2. Russick E.M., Adkins C.L.J., Dyck C.W. Abraham M.A., Sunol A.K. Supercritical Fluids, Extraction and Pollution Prevention. 670:1997;255 American Chemical Society, Washington, DC.
3. de Boer M.P., Clews P.J., Smith B.K., Michalske T.A. Mater. Res. Soc. Proc. 518:1998;131.
4. Maboudian R. Surface Sci. Rep. 30:1998;209.
5. Srinivasan U., Houston M.R., Howe R.T., Maboudian R. J. Micromech. Sys. 7(2):1998;252.
6. Henck S.A. Tribol. Lett. 3:1997;239.
7. McGovern M.E., Kallury K.M.R., Thompson M. Langmuir. 10:1994;3607.
8. Brzoska J.B., Azouz I.B., Rondelez F. Langmuir. 10:1994;4376.
9. Carraro C., Yauw O.W., Sung M.M., Maboudian R. J. Phys. Chem. B. 102(23):1998;4441.
10. Knapp, J. A. and de Boer, M. P., 2000, in preparation.
11. Johnson K.L., Kendall K., Roberts A.D. Proc. R. Soc. London A. 324:1971;301.
12. de Boer M.P., Michalske T.A. J. Appl. Phys. 86(2):1999;817.
13. Sharpe W.N., Vaidyanathan R., Yuan B., Bao G., Edwards R.L. J. Vac. Sci. Tech. 15(5):1997;1599.
14. Israelachvili J.N., McGuiggan P.M., Homola A.M. Science. 240:1988;189.
15. Israelachvili J.N., Chen Y.L., Yoshizawa H. J. Adh. Sci. Tech. 8(11):1994;1231.
16. ABAQUS, version 5.7, Hibbit, Karlsson and Sorensen Inc., Pawtucket, RI, USA.
17. Gupta, R. K., Electrostatic Pull-in Test Structure Design for in-situ Mechanical Property Measurement of MEMS. Ph.D. Thesis, MIT, 82 pp.
18. Houston M.R., Howe R.T., Maboudian R. J. Appl. Phys. 81(8):1997;3474.
19. de Boer, M. P., Mayer, T. M., Michalske, T. A., Srinivasan, U. and Maboudian, R., Trans. ASME J. Trib., 2000, in preparation.
20. Banga R., Yarwood J., Morgan A.M., Evans B., Kells J. Thin Solid Films. 284-285:1996;261.
21. Tripp C.P., Hair M.L. Langmuir. 11:1995;1215.
22. Wirth M.J., Fairbank R.W.P., Fatunmbi H.O. Science. 275:1997;44.
23. Bunker, B. C., Carpick, R. W., Assink, R., Thomas, M. L., Hankins, M. G., Voigt, J. A., Sipola, D. L., de Boer, M. P. and Gulley, G. L., Langmuir, 2000, submitted for publication.
24. Wibbeler J., Pfeifer G., Hietschold M. Sensors and Actuators A. A71:1998;74.
25. Chen Y.L., Israelachvili J.N. J. Phys. Chem. 96:1992;7752.
26. Yamada S., Israelachvili J.N. J. Phys. Chem. B. 102:1998;234.
27. Chaudhury M.K., Owen M.J. Langmuir. 9:1993;29.
28. Fuller K.N.G., Tabor D. Proc. R. Soc. London A. 345:1975;327.
29. Maugis D. J. Adh. Sc. Tech. 10(2):1996;161.
30. Greenwood J.A., Williamson J.B.P. Proc. R. Soc. London A. 295:1966;300.
31. Greenwood, J. A. and Tripp, J. H., Proc. Instn. Mech. Engrs., 1970-71, 185, 625.
32. Gerk A.P., Tabor D. Nature. 271(5647):1978;732.
33. Clarke D.R., Kroll M.C., Kirchner P.D., Cook R.F., Hockney B.J. Phys. Rev. Lett. 60(21):1988;2156.
34. Pharr G.M. J. Mater. Res. 6(6):1991;1129.
35. Gerberich W.W., Ventakaraman K., Huang H., Harvey S.E., Kohlstedt D.L. Acta mater. 43(4):1995;1569.
36. Michalske T.A., Houston J.E. Acta mater. 46(2):1998;391.
37. Israelachvili J. Intermolecular and Surface Forces. 1992;Academic Press, New York.
38. Tian X., Bhushan B. J. Trib. 118:1996;33.
39. Tiddy G.J.T. Phys. Rep. 57(1):1980;1.