Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens

Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences

Volumn 455, Issue 1990, 1999, Pages 3807-3823

  Kahn, H ^a   Ballarini, R ^b   Mullen, R L ^b   Heuer, A H ^b  

^a Department of Materials Science and Engineering ^*  (United States)

^b Case Western Reserve University   (United States)

Author keywords

Electrostatic actuation; Fatigue; Fracture; Microelectromechanical systems (mems); Microfracture; Polysilicon

Indexed keywords

EID: 33746470278     PISSN: 13645021     EISSN: None     Source Type: Journal    
DOI: 10.1098/rspa.1999.0478     Document Type: Article

References (12)

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