Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products

Microelectronics Journal

Volumn 29, Issue 9, 1998, Pages 579-586

  Chau, Kevin H L ^a   Sulouff Jr , Robert E ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

Accelerometers; Capacitive Sensors; Integrated Sensors; MEMS; Micro electro mechanical systems; Surface micromachining

Indexed keywords

ACCELEROMETERS; MICROELECTROMECHANICAL DEVICES; PERFORMANCE; SENSORS; TECHNOLOGY;

CAPACITIVE SENSOR; INTEGRATED SENSOR; SURFACE MICROMACHINING;

MICROELECTRONIC PROCESSING;

EID: 0032163636     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00021-4     Document Type: Article

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