Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces

Journal of Microelectromechanical Systems

Volumn 11, Issue 6, 2002, Pages 754-764

  Knapp, James A ^a   De Boer, Maarten P ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Adhesion modeling; Boundary compliance; MEMS; Microcantilevers; Surface force law

Indexed keywords

ADHESION; CANTILEVER BEAMS; DEFLECTION (STRUCTURES); ELECTROSTATICS; FINITE ELEMENT METHOD; MICROSTRUCTURE; SENSITIVITY ANALYSIS; SURFACE PHENOMENA;

SURFACE FORCE LAW;

MICROELECTROMECHANICAL DEVICES;

EID: 0036905711     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.805047     Document Type: Article

References (33)

1. R. Maboudian, "Surface processes in MEMS technology," Surface Sci. Rep., vol. 30, p. 209, 1998.
2. C.H. Mastrangelo and C.H. Hsu, "A simple experimental technique for the measurement of the work of adhesion of microstructures," in IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 1992, pp. 208-214.
3. _, "Mechanical stability and adhesion of microstructures under capillary forces-part I: Basic theory," J. Microelectromech. Syst., vol. 2, p. 33, Mar. 1993.
4. _, "Mechanical stability and adhesion of microstructures under capillary forces-part II: Experiments," J. Microelectromech. Syst., vol. 2, p. 44, Mar. 1993.
5. M.R. Houston, R.T. Howe, and R. Maboudian, "Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces," J. Appl. Phys., vol. 81, no. 8, p. 3474, 1997.
6. U. Srinivasan, M.R. Houston, R.T. Howe, and R. Maboudian, "Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines," J. Microelectromech. Syst., vol. 7, p. 252, June 1998.
7. M.P. de Boer and T.A. Michalske, "Accurate method for determining adhesion of cantilever beams," J. Appl. Phys., vol. 86, no. 2, p. 817, 1999.
8. M.P. de Boer, P.J. Clews, B.K. Smith, and T.A. Michalske, "Adhesion of polysilicon microbeams in controlled humidity ambients," in Mater. Res. Soc. Proc., vol. 518, San Francisco, CA, 1998, pp. 131-136.
9. M.P. de Boer, J.A. Knapp, T.A. Michalske, U. Srinivasan, and R. Maboudian, "Adhesion hysteresis of silane coated microcantilevers," Acta Mater., vol. 48, no. 18-19, p. 4531, 2000.
10. J.W. Obreimoff, "The splitting strength of mica," Proc. Royal Soc. London A, vol. A127, p. 290, 1930.
11. D.H. Roach, S. Lathabai, and B.R. Lawn, "Interfacial layers in brittle cracks," J. Amer. Ceram. Soc., vol. 71, no. 2, p. 97, 1988.
12. K.-T. Wan, N. Aimard, S. Lathabai, R.G. Horn, and B.R. Lawn, "Interfacial energy states of moisture-exposed cracks in mica," J. Mater. Res., vol. 5, no. 1, p. 172, 1990.
13. B.R. Lawn, Fracture of Brittle Solids, 2nd ed. New York: Cambridge University Press, 1993.
14. In Ref. [9] a Cantilever Configuration With a = 60 μm was Used, Requiring Actuation of up to 160 Volts.
15. G.R. Irwin, "Fracture," in Handbuch der Physik. Berlin: Springer Verlag, 1958, vol. 6, p. 551.
16. J. Yang, H. Kahn, A.Q. He, S.M. Phillips, and A.H. Heuer, "A new technique for producing large-area as-deposited zero-stress LPCVD polysilicon films: The multipoly process," J. Microelectromech. Syst., vol. 9, p. 485, Dec. 2000.
17. Y. Yee, M. Park, and K. Chun, "A sticking model of suspended polysilicon microstructure including residual stress gradient and postrelease temperature," J. Microelectromech. Syst., vol. 7, no. 3, p. 339, 1998.
18. M.P. de Boer, J.A. Knapp, and P.J. Clews, "Effect of nanotexturing on interfacial adhesion in MEMS," in International Conference on Fracture, Honolulu, HI, 2001.
19. G.I. Barenblatt, "The mathematical theory of equilibrium cracks in brittle fracture," Adv Appl. Mech., vol. 7, p. 55, 1962.
20. K.-T. Wan and B.R. Lawn, "Effect of chemical interaction on Barenblatt crack profiles in brittle solids," Acta Mater., vol. 40, no. 12, p. 3331, 1992.
21. H.B.G. Casimir and D. Polder, "The influence of retardation on the London-van der Waals forces," Phys. Rev., vol. 73, p. 360, 1948.
22. D. Tabor and R.H.S. Winterton, "The direct measurement of normal and retarded van der Waals forces," Proc. Royal Soc. Lond. A., vol. 312, p. 435, 1969.
23. H.B. Chan, V.A. Aksyuk, R.N. Kleiman, D.J. Bishop, and F. Cappasso, "Quantum mechanical acutation of microelectromechanical systems by the Casimir force," Science, vol. 291, p. 1941, 2001.
24. J. Israelachvili, Intermolecular and Surface Forces. New York: Academic, 1992.
25. F.M. Serry, D. Walliser, and G.J. Maclay, "The anharmonic Casimir oscillator (ACO)-The Casimir effect in a model microelectromechanical system," J. Microelectromech. Syst., vol. 4, no. 4, p. 193, 1995.
26. _, "The role of the Casimir effect in the static deflection and stiction of membrane strips in microelectromechanical systems (MEMS)," J. Appl. Phys., vol. 84, no. 5, p. 2501, 1998.
27. H.G. Craighead, "Nanoelectromechanical systems," Science, vol. 290, no. 5496, p. 1532, 2000.
28. A.K. El-Senussi and J.P.H. Webber, "On the double cantilever beam technique for studying crack propagation," J. Appl. Phys., vol. 56, no. 4, p. 885, 1984.
29. P.M. Osterberg and S.D. Senturia, "M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures," J. Microelectromech. Syst., vol. 6, no. 2, p. 107, 1997.
30. J.J. Sniegowski and M.P. de Boer, "IC-compatible polysilicon surface micromachining," Annu. Rev. Mater Sci., vol. 30, p. 297, 2000.
31. B.D. Jensen, M.P. de Boer, N.D. Masters, F. Bitsie, and D.A. LaVan, "Interferometry of actuated cantilevers to determine material properties and test structure nonidealities in MEMS," J. Microelectromech. Syst., vol. 10, no. 3, p. 336, 2001.
32. H.L. Ewaldsand R.J.H. Wanhill, Fracture Mechanics. London, U.K.: Edward Arnold and Delftse Uitgevers Maatschapij, 1991.
33. "ABAQUS/Standard Versions 5.7-6.0," Hibbitt, Karlsson & Sorensen, Inc., Pawtucket, RI.