A new technique for measuring the mechanical properties of thin films

Journal of Microelectromechanical Systems

Volumn 6, Issue 3, 1997, Pages 193-198

  Sharpe Jr , W N ^a,b,c,d,e,f   Yuan, Bin ^a   Edwards, R L ^b  

^a Johns Hopkins University   (United States)

^b JOHNS HOPKINS UNIVERSITY   (United States)

^c NORTH CAROLINA STATE UNIVERSITY   (United States)

^d MICHIGAN STATE UNIVERSITY   (United States)

^e Louisiana State University   (United States)

^f ASME   (United States)

Author keywords

Polysilicon; Tensile strength; Thin films; Young's modulus

Indexed keywords

ELASTIC MODULI; FRACTURE TOUGHNESS; FRICTION; GAGES; LASER BEAMS; NUMERICAL METHODS; PHOSPHORUS; SILICON; STRAIN MEASUREMENT; TENSILE TESTING; THIN FILMS;

INTERFEROMETRIC STRAIN DISPLACEMENT GAGE; MICROELECTROMECHANICAL SYSTEM; POLYSILICON;

MECHANICAL VARIABLES MEASUREMENT;

EID: 0031236953     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.623107     Document Type: Article

References (15)

1. J. J. Vlassak and W. D. Nix, "A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films," J. Materials Res., vol. 7, no. 12, pp. 3242-3249, 1992.
2. D. S. Stone et al., "Indentation technique to investigate elastic moduli of thin films on substrate," in Thin Films: Stress and Mechanical Properties, vol. 130. Pittsburgh, PA: Materials Research Soc., 1989, pp. 105-110.
3. J. Koskinen et al., "Microtensile testing of free-standing polysilicon fibers of various grain sizes," J. Micromech. Microeng., vol. 3, no. 1, pp. 13-17, 1993.
4. T. P. Weihs, S. Hong, J. C. Bravman, and W. D. Nix, "Measuring the strength and stiffness of thin film materials by mechanically deflecting cantilever microbeams," in Thin Films: Stress and Mechanical Properties, vol. 130. Pittsburgh, PA: Materials Research Soc., 1989, pp. 87-92.
5. +-silicon films," Sens. Actuators, vol. A23, nos. 1-3, pp. 866-871, 1990.
6. Standard Test Method for Young 's Modulus, Tangent Modulus, and Chord Modulus, ASTM Standard E 111-82.
7. W. N. Sharpe, Jr., "Applications of the interferometric strain/ displacement gage," Opt. Eng., vol. 21, no. 3, pp. 483-488, 1982.
8. _, "Crack tip opening displacement measurement techniques," in Experimental Techniques in Fracture. Bethel, CT: Soc. Experimental Mech., 1993, ch. 7, pp. 219-252.
9. _, "An interferometric strain/displacement measurement system," NASA Tech. Memo. 101638, 1989.
10. W. N. Sharpe, Jr., C. H. Yang, and R. L. Tregoning, "An evaluation of the neuber and glinka relations for monotonie loading," J. Appl. Mech., pp. S50-S56, June 1992.
11. W. Voigt, Lehrbuch der Krystallphsik. Leipzig, Germany: B.G. Teubner, 1910.
12. A. Reuss, Zeitschrift für Angewandte Mathematik und Mechanik, no. 9, pp. 49-58, 1929.
13. C. J. Smithells, Metals Reference Book, 5th ed. London & Boston: Butterworths, 1976, p. 978.
14. J. P. Holman, Experimental Methods for Engineers, 6th ed. New York: McGraw-Hill, 1994.
15. J.-Å Schweitz, "Mechanical characterization of thin films by micromechanical techniques," MRS Bull., vol. 17, no. 7, pp. 34-45, July 1992.