Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures

Journal of Micromechanics and Microengineering

Volumn 9, Issue 3, 1999, Pages 245-251

  Greek, Staffan ^a   Ericsont, Fredric ^a   Johansson, Stefan ^a   Fürtsch, Matthias ^b   Rump, Arnold ^b  

^a UPPSALA UNIVERSITY   (Sweden)

^b ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002193058     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/3/305     Document Type: Article

References (12)

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